LMI Technologies FocalSpec, Руководство пользователя

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Figure 46. Z-Calibration statistics
Z-linearity is the maximum Z-calibration error within the Z-range.
Flatness is the maximum Z-error compared to the flat surface over the measurement area.
Z-repeatability is the standard deviation of Z measurements averaged over the measurement area.
After the Z-Calibration, the software asks whether the scaling check should be run or not.
9. Optionally, select Check Scaling.
You can check the scaling by measuring the 1 mm groove. This option is not available with the LCI401 sensor.
If the measurement indicates a large difference compared to the given 1000 µm groove height, the software
proposes a new
Groove Height value for the Z-Calibration. If the new value is accepted, Z-Calibration is done
again.
This step is usually needed at the first run, when the specimen is not certified and the original estimate for the
Groove Height was incorrect.
After measurement the value is shown on the 1000 µm Average row.
10. Optionally, select Verify .
You can optionally perform a Z-calibration verification. In this step, a 30 µm groove is measured over the measured
area. This step is recommended, but it takes few minutes.
The verification process starts with the ‘Groove Position’ dialog to make sure that the motor has not moved since
the last calibration step.
The following values are calculated:
- 30 µm Average is averaged groove height over the measurement area
- 30 µm Max-Min is maximum difference calculated over the measurement area
- 30 µm StdDev is averaged standard deviation over all the measurement points