LMI Technologies FocalSpec, Руководство пользователя

Страница: 42 / 94

42
Select Move to Small Mirror . The table moves to the round flatness calibration mirror.
6. Adjust the sensor angle.
Adjust the sensor angle to horizontally level the profile. Turn on Auto Zoom above the profile window.
You can adjust the sensor angle by opening the lock screw (B) and turning the tilt angle screw (A) clockwise or
counterclockwise. Adjust/level the profile so that both ends are on the same level within 10 μm range. After
adjusting, tighten the locking screw.
Figure 50 Adjusting the sensor angle
Figure 45 Adjust Mirror Position
7. Verify the groove position.
Select Move Back to Groove . The table moves to the small groove. The Z value and X distance to the center
should be as close to 0 as possible. If needed, use the Move to Center button to adjust the groove position. When
the position is correct, select Next .
8. Select Next
Z-Calibration starts by scanning the groove over the sensor’s Z-range. After that, the table automatically moves to
the small mirror and the mirror is scanned over the sensor’s measurement area.
Z-Calibration calculates linearity and flatness indicators to illustrate calibration accuracy. Indicators are visible in
the top-right corner of the view, in the
Working Data column.