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2. Crystal ceases to oscillate
during deposition before it
reaches the end its normal
life
a. Crystal struck by
particulate or spatter from
molten source
a. Thermally condition the
source thoroughly before
deposition, use a shutter to
protect the crystal during
source conditioning
b. Material on crystal holder
partially masking crystal
cover aperture
b. Clean crystal holder
c. Existence of electrical
short or open condition
c.Using an ohm meter or
DVM, check for electrical
continuity in the sensor
cable, connector, contact
springs, connecting wire
inside sensor, and
feedthroughs
d. Check for thermally
induced electrical short or
open condition
d. See C above
NOTE:
Crystal life is highly dependent on process conditions of rate, power radiated from
source, location, material, and residual gas composition.
3. Crystal does not oscillate
or oscillates intermittently
(both in vacuum and in air)
a. Intermittent or poor
electrical contact (contacts
oxidized)
a. Use an ohm meter or DVM
to check electrical continuity,
clean contacts
b. Leaf springs have lost
retentivity (ceramic retainer,
center insulator)
b. Bend leaves to approx. 45°
c. RF interference from
sputtering power supply
c. Verify earth ground, use
ground strap adequate for
RF ground, change location
of IC6 and oscillator cabling
away from RF power lines,
connect IC6 to a different
power line
d. Cables/oscillator not
connected, or connected to
wrong sensor input
d. Verify proper connections,
and inputs relative to
programmed sensor
parameter
Table 15-8 Troubleshooting Transducers/Sensors (continued)
SYMPTOM
CAUSE
REMEDY
Содержание IC6
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