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IC6 Operating Manual
10.4.35.4 Query General Parameter
Active Process (1)
Command Format: QG <Command ID>
QG1
Command QG1 =
030051470199
Response:
07000019060200000021
10.4.35.5 Update General Parameter
Active Process (1), Make Process 2 active
Command Format: UG <Command ID> <Paramter Value>
UG1 2
Command UG1 2:
0700554701020000009F
Response:
030000C506CB
10.4.35.6 Query Material Parameter
Z-Ratio (2), Material 1
Command Format: QM <Command ID> <Material Number>
QM2 1
Command QM2 1:
0400514D0201A1
Response:
070000F10648E1BA3E18
10.4.35.7 Update Material Parameter
Control Loop (4), Material 1, PID (2)
Command Format: UM <Command ID> <Material Number> <Parameter Value>
UM4 1 2
Command UM4 1 2:
0800554D040102000000A9
Response:
0300000D0613
10.4.35.8 Query Sensor Parameter
Shutter Output (1), Sensor 1
Command Format: QS <Command ID> <Sensor Number>
QS1 1
Command QS1 1:
040051530101A6
Response:
0700008706000000008D
Содержание IC6
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