Edwards nRVi, Инструкция по эксплуатации

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the concentration of flammable gases or vapours in the pump and in the exhaust
pipeline to less than one quarter of the gases' published Lower Explosive Limits
(LEL).
▪ Use an inert gas purge into the pump gas ballast connection to prevent the
condensation of flammable vapours within the pump mechanism and exhaust
pipeline.
6.1.2 Gas purges
WARNING:
If using inert gas purges to dilute dangerous gases to a safe level, ensure that the
pump is shut down if an inert gas supply fails.
WARNING:
Obey the instructions and take note of the precautions given below to ensure that
pumped gases do not enter their flammable ranges.
Switch on the inert gas purge to remove air from the pump and the exhaust pipeline
before the process starts. Switch off the purge flow at the end of the process only after
any remaining flammable gases or vapours have been purged from the pump and
exhaust pipeline.
If liquids that produce flammable vapours could be present in the pump foreline, then
the inert gas purge to the pump should be left on all the time this liquid is present.
Flammable liquids could be present in the foreline as a result of condensation or may be
carried over from the process.
When calculating the flow rate of inert gas required for dilution, consider the maximum
flow rate for the flammable gases/vapours that could occur. For example, if a mass flow
controller is used to supply flammable gases to the process, assume a flow rate for
flammable gases that could arise if the mass flow controller is fully open.
Continually measure the inert gas purge flow rate: if the flow rate falls below that
required, stop the flow of flammable gases or vapours into the pump.
Note:
We recommend obtaining and reading the Vacuum Pump and Vacuum System Safety
manual (publication number P40040100), available from us or the supplier.
CAUTION:
The controlling interface is determined by the interface that starts the pump. Once
started, the pump can only be stopped or put in standby mode by the interface that it
was started from, except in auto run. With auto run, the stop button on the user
interface panel will override it and stop the pump. To stop the pump locally when in
parallel or serial mode, manually remove the power cable.
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A65901880_D - Operation