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This product has been manufactured under a quality management system certified to ISO 9001:2015

Documentation Officer:

Jelena Havelkova, Spielberk Office Centre, Holandska 10, Brno, 63900 Czech Republic,



: +42(0) 734 418 896,



: [email protected]

This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product

serial numbers from this date on:

May 2020.

Petr Smerek – Engineering Manager

Scientific Vacuum Division

Lutin, CZ

Nina Buta – General Manager

Lutin, CZ

Содержание nRVi

Страница 1: ...Rotary Vane Pumps nRVi INSTRUCTION MANUAL A65901880_D Original instructions edwardsvacuum com...

Страница 2: ...in this manual nor do we make any expressed or implied warranties regarding the content As far as practical we have ensured that the products have been designed and constructed to be safe and without...

Страница 3: ...ve as amended by Delegated Directive EU 2015 863 Based on the relevant requirements of harmonised standards EN 1012 2 1996 A1 2009 Compressors and vacuum pumps Safety requirements Vacuum pumps EN 6101...

Страница 4: ...entre Holandska 10 Brno 63900 Czech Republic 42 0 734 418 896 documentation edwardsvacuum com This declaration based on the requirements of the listed Directives and EN ISO IEC 17050 1 covers all prod...

Страница 5: ...this substance is present in certain aluminium and brass components ADDITIONAL INFORMATION The products listed are also in scope for and comply with the requirements of the following 2012 19 EU Direc...

Страница 6: ...This page has been intentionally left blank...

Страница 7: ...3 5 Noise and vibration data 23 3 6 Lubrication data 23 3 7 Electrical data 23 3 8 Logic interface data 24 3 9 Valve connector socket 26 3 10 Indicator LEDs 27 3 11 Serial protocol 27 4 Installation...

Страница 8: ...he pump controller 54 6 3 1 Start the pump using the pump controller 54 6 3 2 Using the pump controller to activate standby mode 54 6 3 3 Stop the pump using the pump controller 54 6 4 Operation with...

Страница 9: ...7 3 1 Replace the oil service indicator 70 7 3 2 Replace the oil and clean and overhaul the pump service indicator 70 7 3 3 Replace the oil clean and overhaul the pump and replace the blades 71 7 3 4...

Страница 10: ...2 1 Inlet catchpot 87 11 2 2 Inlet dust filter 87 11 2 3 Inlet desiccant trap 87 11 2 4 Inlet chemical trap 88 11 2 5 Foreline trap 88 11 2 6 Outlet mist filter 88 11 2 7 Gas ballast adaptor 88 11 2 8...

Страница 11: ...42 Figure 9 Logic interface connections analogue speed control 43 Figure 10 Analogue speed control 43 Figure 11 Logic interface connections RS232 serial control 44 Figure 12 Logic interface connection...

Страница 12: ...ate requirements and regulations If you have any questions about safety operation or maintenance of the device please contact our nearest subsidiary Important safety information is highlighted as warn...

Страница 13: ...potential ignition sources internal to the equipment An ATEX Category has not been assigned in respect of potential ignition sources on the outside of the equipment as the equipment has not been desig...

Страница 14: ...within the equipment Do not allow air to enter the equipment Ensure that the system is leak tight For further information please contact us refer to our website www edwardsvacuum com for details of yo...

Страница 15: ...equipment An oil pump delivers pressurised oil to the vacuum pumping mechanism in the pump The oil level and condition can be inspected in the oil box through a sight glass Two oil filler plugs and an...

Страница 16: ...ller 12 Correct direction of rotation 13 Electrical inlet connector 14 Pump controller user interface 2 2 Pump controller The integral pump controller manages the supply of current to a three phase el...

Страница 17: ...that go in and out of the pump 4 USB port service mode only USB port for use in service mode only 5 Standby speed increase button The pump speed will increase The increase standby indicator will rema...

Страница 18: ...gnals on the logic interface The signal types are Control inputs these are switch type and analogue signals that are used to control the pump Status outputs these outputs identify the status of the sy...

Страница 19: ...e pump can sustain long term high inlet pressures 2 3 2 Gas ballast control To pump high vapour loads gas ballast is delivered into the pump to prevent condensation of the vapour carried by the pumped...

Страница 20: ...to 90 seconds to reach full speed At ultimate vacuum with ambient temperature of 20 C The pump can operate safely up to 3000 m when operating above 2000 m contact us for advice Note To comply with IEC...

Страница 21: ...allast control define the performance characteristics of the pump These performance characteristics are listed fully in Table High vacuum mode performance data on page 20 and Table High throughput mod...

Страница 22: ...gure 3 nRV4i performance graph 1 Speed 2 Supply power kW 1 Speed 2 Supply power kW Figure 4 nRV6i performance graph 1 Speed 2 Supply power kW 1 Speed 2 Supply power kW Page 18 A65901880_D Technical da...

Страница 23: ...Supply power kW 1 Speed 2 Supply power kW Table 5 Performance data Parameter Value Units nRVi4i nRV6i nRV10i nRV14i Suckback protection 1 x 10 5 mbar l s 1 1 x 10 3 Pa l s 1 Maximum initial pressure...

Страница 24: ...10 1 2 x 10 1 2 x 10 1 Pa Gas ballast control low flow position I ultimate total pressure 3 x 10 2 3 x 10 2 3 x 10 2 3 x 10 2 mbar 3 3 3 3 Pa Gas ballast flow 5 5 5 5 Litres Maximum water vapour pumpi...

Страница 25: ...1 6 6 Pa Gas ballast flow 14 14 16 16 Litres Maximum water vapour pumping rate 0 12 0 12 0 20 0 25 kg h 1 Maximum water vapour inlet pressure 54 32 34 28 mbar 5 4 x 103 3 2 x 103 3 4 x 103 2 8 x 103 P...

Страница 26: ...vapour pumping rate 0 04 kg h 1 0 12 kg h 1 nRV4 6i 0 20 kg h 1 nRV10i 0 25 kg h 1 nRV14i 3 4 Manufacturing materials Table 10 Materials in contact with pumped gases Material Where used High grade cas...

Страница 27: ...meter Value Units nRV14i nRV6i nRV10i nRV14i Recommended oil Hydrocarbonprepared pumps Edwards Ultragrade 19 PFPE prepared pumps Krytox 1506 or Fomblin 06 6 Oil capacity Maximum 0 70 0 70 0 75 1 00 Li...

Страница 28: ...urbo and Active Gauge Controller A suitable connector mating half not supplied must be used to connect the pump to the control system Refer to Table Logic interface technical data on page 24 for the i...

Страница 29: ...half of connector not supplied Table 16 Logic interface connector pins Pin number Signal Polarity Use 1 Analogue Speed Enable Control Input Connect to Pin 2 0 V to enable analogue speed control via P...

Страница 30: ...rotational speed is at normal speed or above 3 9 Valve connector socket The pump has a 4 way valve connector socket on the front of the motor controller The connector is intended to control a valve T...

Страница 31: ...LED This red LED flashes in a sequence to indicate an error code if a FAIL condition is preventing pump operation The error codes can be used for fault finding as described in Alarm indicator codes on...

Страница 32: ...actory setting Data type Units Comments Identification S0 Acts as wildcard object number to identify instrument Reply identical to S801 Node S800 0 98 0 Decimal Slave Address Multi drop address RS485...

Страница 33: ...is the drawing number and Y is the revision 1 255 String Hz Design frequency Nominal mechanical frequency of the pump Pump control C802 0 Decimal Stop the pump 1 Decimal Start the pump V802 0 255 Deci...

Страница 34: ...perature Link parameter readings V809 0 5000 Decimal 0 1 V Measured link voltage 0 300 Decimal 0 1 A Measured motor current 0 15000 Decimal 0 1 W Measured motor power Run hours V810 0 99999 11 years D...

Страница 35: ...ator time since to zero and time to to service interval Fault history 1 V816 0 99999 64 bits encoded as four 16 bit words 0000 FFFF 0000 FFFF 0000 FFFF 0000 FFFF Decimal Hexidecimal Hours Fault histor...

Страница 36: ...evision Factory settings C821 1 Decimal Reset all configuration options and parameters to factory settings Motor control boot loader version S822 1 11 String ASCII Characters Motor control boot loader...

Страница 37: ...S835 1 30 String ASCII Characters Serial numbers pump drive module and power control PCA fixed at manufacture 9 characters each 1 36 String ASCII Characters Pump type and build If either returned valu...

Страница 38: ...control via nRVi user interface Refer to Figure Pump controls and indicators on page 13 Serial control via TIC Turbo Instrument Controller or Turbo Controller Manual D39722880 Parallel control via TA...

Страница 39: ...tioning of the fastening points can be found on Figure Dimensions on page 17 Use a suitable valve to isolate the pump from the vacuum system to allow the pump to warm up before pumping condensable vap...

Страница 40: ...technician must install the pump Obey the safety instructions listed below when installing the pump especially when connecting the pump into an existing system Details of specific safety precautions...

Страница 41: ...falls below that required stop the flow of flammable gases or vapours into the pump Note Refer to the Vacuum Pump and Vacuum System Safety manual publication number P40040100 supplied with the pump 4...

Страница 42: ...nts using suitable lifting equipment 3 If the pump is damaged notify the supplier and the carrier in writing within three days state the item number of the pump together with the order number and the...

Страница 43: ...formation when connecting the pump to the vacuum system Refer to Figure General view of the pump on page 12 Before connecting the pump to the vacuum system fit the centring ring and inlet filter suppl...

Страница 44: ...ntrol and to Connect the electrical supply on page 40 for instructions on how to connect the electrical supply 4 7 1 Electrical installation requirements Take note of the following list of electrical...

Страница 45: ...between pin 3 and pin 2 To put the pump into standby connect both Standby control input pin 4 and Start Stop control input pin 3 to the 0 V reference pin 2 Note Serial enable is also a control input...

Страница 46: ...ntrol source refer to Table Logic interface connector pins on page 25 1 To activate the analogue speed control input connect the Remote control input pin 14 to the 0 V reference pin 2 2 Connect the an...

Страница 47: ...etting 30 Hz 2 Lower speed clamp Minimum standby speed setting 20 Hz 3 Active speed range 66 66 to 100 20 Hz to 30 Hz 4 Active voltage range 6 66 V to 10 V Note Voltages below 6 7 V will result in a c...

Страница 48: ...6 m Alternatively an interface circuit external to the pump may be required to communicate using the RS232 serial link over longer distances The software in the pump is can operate with several pumps...

Страница 49: ...ands sent over the serial interface and at the same time monitor the normal signal using the parallel interface Figure Logic interface connections mixed parallel and serial control on page 45 shows a...

Страница 50: ...RVi pump logic interface PC 4 13 Leak test the system WARNING Process gases which leak from the pipelines will be dangerous to people and there may be a danger of explosion or fire if air leaks into t...

Страница 51: ...control and monitoring and the controller settings will not be reconfigured go straight to Before starting the pump on page 54 5 1 Configure the pump using serial commands Refer to Table Summary of c...

Страница 52: ...s are to indicate typical length All data fields have a maximum of 5 decimal characters prefixed by a minus number for negative numbers Fields showing multiple X characters are to indicate maximum len...

Страница 53: ...reply will be in the following format Reply S 8 0 5 sp r cr The Standby Speed is now stored in memory within the DX pump To check what Standby Speed is set send a query as follows Command S 8 0 5 cr T...

Страница 54: ...can be a decimal number from 1 to 98 The address number 0 is used to disable multi drop mode The address number 99 is reserved as a wild card and is used in the query set up detailed later The reply...

Страница 55: ...nger respond to multi drop commands 5 2 Configure the pump using a TIC The pump can be configured using the TIC Turbo and Instrument Controller or TIC Turbo Controller It is possible to set the follow...

Страница 56: ...ipment as the equipment has not been designed for use where there is an external potentially explosive atmosphere There is no potential source of ignition within the pump during normal operation but t...

Страница 57: ...all the time this liquid is present Flammable liquids could be present in the foreline as a result of condensation or may be carried over from the process When calculating the flow rate of inert gas...

Страница 58: ...ontroller panel to start the pump 6 3 2 Using the pump controller to activate standby mode Standby mode enables the pump to be run at a reduced speed to improve the service life of the pump If the pum...

Страница 59: ...mal signal and fail signal parameters can be monitored on the control system Refer to Connect the parallel control and monitoring on page 41 for instructions on how to monitor these signals 6 5 Operat...

Страница 60: ...he pump rotor will decelerate to rest 6 5 4 Monitor temperature readings with serial control The temperatures of the pump motor and the internal electronics of the pump can be monitored Command v 8 5...

Страница 61: ...unction of the serial enable line is to enable the serial link It has no direct effect on the control mode The pump will receive and respond to serial commands whenever the serial enable line is activ...

Страница 62: ...in a range of 0 V to 10 V to change the running speed of the pump The minimum running speed provided by the analogue speed control source is clamped at the minimum standby speed setting i e 67 of the...

Страница 63: ...schematic diagram of an example multi drop connection system which can be expanded to accommodate multiple pumps 6 8 1 Assigning a multi drop address The received pump will have multi drop mode disab...

Страница 64: ...n setting is visible via the auto run LED 2 Stop the pump using either manual parallel or serial control modes whilst in auto run 6 10 Operation with a valve The valve output is pre configured to cont...

Страница 65: ...ensable vapours to decontaminate the oil 6 11 2 Gas ballast control Use the gas ballast control to change the amount of air or inert gas introduced into the low vacuum stage of the pump Use of gas bal...

Страница 66: ...position II and operate the pump for 30 minutes to warm the oil this will help to prevent vapour condensation in the pump 4 Set the gas ballast control to the position required for the application re...

Страница 67: ...y the contaminates in the oil 1 Refer to Decontaminate the oil on page 66 and decontaminate the oil as required 2 Stop the pump 3 Close the vacuum system isolation valve if not already closed 4 Close...

Страница 68: ...ocess chemicals that have been pumped during operation Ensure that the pump is decontaminated before maintenance and that adequate precautions are taken to protect people from the effects of dangerous...

Страница 69: ...an the motor fan cover and enclosure on a yearly basis Clean and overhaul the pump on page 69 Clean and overhaul the pump after every 15000 hours of operation Fit new blades on page 69 Fit new blades...

Страница 70: ...hes the MAX level mark on the bezel of the oil level sight glass 6 8 Allow a few minutes for the oil to drain into the pump If necessary add more oil Refit the filler plug 7 2 3 Decontaminate the oil...

Страница 71: ...e gas ballast control 1 to the high flow position position II 2 Push the control down against the compression spring 6 as far as it will go then turn the control anticlockwise slightly to release the...

Страница 72: ...in Replace the oil on page 66 2 Undo the two screws and remove the bezel the sight glass and the O ring from the oil box 3 Clean the screws bezel and sight glass with a suitable cleaning solution 4 Wi...

Страница 73: ...ted and the pump may overheat 1 Switch off the pump and disconnect it from the electrical supply 2 Use a dry cloth and a soft brush to remove dirt and deposits from the fan cover and enclosure 7 2 8 C...

Страница 74: ...service indicator flashing ON 3s OFF 1s is triggered as a reminder to replace the oil clean and overhaul the pump and replace the blades Replace the pump controller service indicator on page 71 The se...

Страница 75: ...ervice indicator The service indicator flashing ON 3s OFF 3s is triggered to indicate that the pump controller should be replaced Refer to Replace the pump controller on page 70 This service indicator...

Страница 76: ...ge 72 Fault The pump does not start after a manual start is sent Cause Check that the electricity supply is on and whether the fail output is active Remedy If there is a fail signal check whether the...

Страница 77: ...lines Fault Yellow service LED is flashing a repeated sequence Cause A service is necessary Remedy Refer to Service indicator codes on page 70 Fault The red alarm LED is on Cause Normal during the so...

Страница 78: ...measurement technique or gauge head is unsuitable or gives an incorrect indication of pressure For example a contaminated Pirani gauge can indicate a pressure which is several times higher than the ac...

Страница 79: ...cceptable level and check that the ambient temperature is less than 40 C Cause The outlet filter or the outlet pipeline is blocked Remedy Clear the exhaust path Replace or clear the exhaust filter if...

Страница 80: ...ul kit or return the pump to our service centre for repair Cause There is an oil leak from the sight glass Remedy Replace the seals as supplied in the clean and overhaul kit or return the pump to our...

Страница 81: ...t trip activated or other hardware fault Cycle the power to the pump and see whether the error code appears again If it does contact us or the supplier 5 ssssLs Self test fault Cycle the power to the...

Страница 82: ...or the least significant to 15 for the most significant as shown below Binary digits 0 0 0 0 0 0 0 0 0 0 1 0 0 0 1 0 1 5 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit numbers The following 4 tables each cont...

Страница 83: ...ontroller is operating in bit 13 bit 7 bit 6 000 none 001 serial 010 parallel 011 manual 100 111 reserved eed 7 8 Reserved 9 Reserved 10 Serial enable Serial enable active 11 Reserved 12 Reserved 13 C...

Страница 84: ...n 0 lsb Reserved 1 Low pump controller temperature Pump controller temperature is below the minimum measurable value 2 Reserved 3 Reserved 4 Reserved 5 Reserved 6 Pump controller temperature regulator...

Страница 85: ...a serial start command 14 Overload time out Fault because the output frequency fell below the threshold for more than the allowable time with an active start command 15 msb Acceleration time out Fault...

Страница 86: ...ble Service flags on page 82 Table 32 Service flags Bit number Status flag Active flags mean 0 Clean and overhaul service due Set when hours until clean and overhaul service due 0 1 Replace the blades...

Страница 87: ...mp as described in Shut down the pump on page 63 2 Disconnect the pump from the electrical supply 3 Purge the vacuum system and the pump with dry nitrogen and disconnect the pump from the vacuum syste...

Страница 88: ...be taken with any components that have been contaminated with dangerous process substances Take appropriate action to avoid inhalation of any particles that may be present in the pump Do not incinera...

Страница 89: ...ance and will invalidate product warranty The spares available for the turbo pump and backing pumps are listed in the CD instruction manuals supplied with your equipment Refer to General description o...

Страница 90: ...ge 88 A13305000 EMF10 Outlet mist filter Outlet mist filter on page 88 A46226000 EMF20 Outlet mist filter Outlet mist filter on page 88 A46229000 Gas ballast adaptor Gas ballast adaptor on page 88 A50...

Страница 91: ...nlet chemical trap 5 Solenoid operated gas ballast valve 6 Foreline trap 7 Solenoid operated pipeline valve 8 Outlet mist filter 9 Gas ballast adaptor 10 Gravity oil drain kit 11 Vibration isolators 1...

Страница 92: ...f or when the gas ballast control is closed in the 0 position and there is no process gas being pumped 11 2 9 Oil drain extension Fit the oil drain extension between the oil drain port on the pump and...

Страница 93: ...witched off 11 2 14 Electrical cables Electrical cables are available as accessories and should be used to connect the pump to the electrical supply 11 2 15 Pump to controller cable Use the controller...

Страница 94: ...are suitable for pumping high concentrations of oxygen it is recommended that they are not used for the pumping of hazardous materials Operation of a PFPE prepared pump is as specified in Operation o...

Страница 95: ...filled with Fomblin oil carrying out regular checks for oil leaks is recommended particularly around the shaft seals If an oil leak is detected contact us or the supplier for advice Page 91 A65901880_...

Страница 96: ...important for the safety of our employees and all other people involved in the service of your equipment The hazard information also lets us select the correct procedures to service your equipment We...

Страница 97: ...Page 93 A65901880_D Service...

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Страница 100: ...edwardsvacuum com...

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