A1000 INSTALLATION, OPERATION, & MAINTENANCE MANUAL
February 2016 | 256574-ENG
R01 2-27
2.5.2 AR Kit Installation
This support is very important because it directs the airflow through the back wall plenum at equal
pressure. A loose installation will not distribute the airflow evenly.
To install the back wall plenum bottom support:
Install the support, Item A, onto the back wall of the chamber with four (4) screws, Item C (Figure
2-32) and tighten the screws to full resistance.
Figure 2-32
AR Back Wall Plenum Bottom Support Installed
The back wall plenum bottom support and the back wall plenum may be installed at
the factory.
Install the support with the large flange pointing upward as shown in Figure 2-32.
C
A
Содержание ADAPTIS A1000
Страница 1: ...A1000 INSTALLATION OPERATION MAINTENANCE MANUAL 256574 ENG R01 ...
Страница 14: ...Precautions 1 4 February 2016 256574 ENG R01 ...
Страница 46: ...Kit Installation 2 32 February 2016 256574 ENG R01 ...
Страница 54: ...Chamber Start Up and Operation 5 4 February 2016 256574 ENG R01 ...
Страница 63: ......