
User Manual
5 Step-by-Step Guides
94
5.13.3
Standard-based Zeta Quantification
This section describes how to perform standard-based quantification of electron transparent
samples using beam current and thickness of standard sample as reference values.
Step
Example/hints
1
Click the
Standards configurator
’s
calibration icon
to open the
SYSTEM FACTOR CALIBRATION
dialog.
2
Measure and enter the beam current
value as system factor.
Follow section 5.10 for electron transparent
samples. Enter the beam current in [pA] units.
3
Check or Load the appropriate Zeta
factors.
Follow section 5.11.3.
4
Select the
or
workspace and
a)
a spectrum
b) use the Spectrum chart
icon to
open a spectrum
Enter the beam current as spectrum
parameter: double click on the highlighted line
of the active spectrum in the spectrum list
(below the spectrum) to open the
SPECTRUM PROPERTIES
dialog and enter
the beam current in pA as system factor in
the
Parameter
tab.
c) drag and drop a spectrum from project
to Spectrum chart.
5
Click on the
button and
Load…
a quantification method.
Select a TEM quantification method.
Alternatively drag and drop a quantification
method from the project to spectrum.
6
Set the quantification method to
interactive
(
).
7
Click on the
button to
access the
QUANTIFICATION
dialog.
8
Set
Quantification model
to Zeta factor
method and perform quantification of
“unknown” sample.
See section 5.12.1 to optimize quantification
and to save or export quantification method
and results.
Calculated thickness is shown below the
result table. Density is calculated based on
element composition. If density is known, it
can be entered and sample thickness will
change correspondingly.
9
Click
to close the
QUANTIFICATION
dialog.
Содержание QUANTAX EDS
Страница 1: ...QUANTAX EDS Energy dispersive X ray spectrometer for electron microscopy User Manual ...
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Страница 8: ...User Manual 2 Safety Information 8 ...
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Страница 52: ...User Manual 5 Step by Step Guides 52 Fig 5 1 1 Preparatory steps for measurements with the ESPRIT software ...
Страница 54: ...User Manual 5 Step by Step Guides 54 Fig 5 2 1 Spectrometer calibration ...
Страница 56: ...User Manual 5 Step by Step Guides 56 Fig 5 3 1 Image capture ...
Страница 58: ...User Manual 5 Step by Step Guides 58 Fig 5 4 1 Image extension ...
Страница 60: ...User Manual 5 Step by Step Guides 60 Fig 5 5 1 Image drift correction ...
Страница 62: ...User Manual 5 Step by Step Guides 62 Fig 5 6 1 Image processing ...
Страница 67: ...5 8 Using the Spectrum Chart QUANTAX EDS 67 Fig 5 8 1 Features in the spectrum chart ...
Страница 72: ...User Manual 5 Step by Step Guides 72 Fig 5 10 2 Beam current setting ...
Страница 75: ...5 11 Standards Library QUANTAX EDS 75 Fig 5 11 2 Quantification dialog ...
Страница 85: ...5 12 Quantitative EDS Analysis of Bulk Samples QUANTAX EDS 85 Fig 5 12 2 Automatic standardless quantification ...
Страница 97: ...5 14 Object Analysis QUANTAX EDS 97 Fig 5 14 1 Object analysis ...
Страница 108: ...User Manual 5 Step by Step Guides 108 Fig 5 19 1 Map processing ...
Страница 111: ...5 20 Phase Analysis QUANTAX EDS 111 Fig 5 20 1 Performing phase analysis ...
Страница 113: ...5 21 Creating a Report QUANTAX EDS 113 Fig 5 21 1 Creating a report ...
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