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5.2 Energy-Channel Calibration QUANTAX EDS
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5.2 Energy-Channel Calibration
Correct energy-channel calibration is a prerequisite for reliable qualitative and quantitative analysis
results. Calibration should be checked on a regular basis or after re-start of the signal processing
unit (SVE).
Step
Examples/hints
1
Select the workspace and
the Spectrometer tab.
Do not confuse energy-channel calibration
with system factor calibration (relevant for
standard-based quantification; for details see
section 5.12.3 and 5.12.4).
2 Set a calibration sample into the analysis
position.
Use a sample with any element in the mid
energy range (Mn – Zn) without peak overlap
and sufficient concentration. Preferably use
single element standards (e.g. pure copper) to
avoid peak misidentification, improve speed
and accuracy.
3 Set the beam current to produce an
intermediate count rate.
Use microscope controls. Set appropriate
magnification on a homogeneous sample
area.
4 Select element and spectral line for
calibration.
Use K
α
lines whenever possible.
5
Click to check the current
energy channel calibration and deviation.
The test corresponds to the current Pulse
throughput and Maximum energy displayed
in the
EDS configurator
. The acceptable
deviation value is b 5 eV and - 5 eV.
If not, proceed with step 6.
6 Select
Pulse throughput
and
Energy
range
under
Settings to calibrate
.
7
Choose accuracy and click
.
Recommended value is
Medium.
8
Click to save new calibration
data.
The calibration data is not user specific.
Changes in calibration will affect all users of
the ESPRIT software.