BOC Edwards Temescal SuperSource2 STIH-270-2PT, Руководство пользователя

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SECTION 5
SOURCE DISASSEMBLY
5.1 SEC TION OVER VIEW
This sec tion de scribes in de tail the cor rect pro ce dure for dis as sem bling the source. The pro ce dures de scribed
in this sec tion should be fol lowed when ever the source is par tially or com pletely dis as sem bled for clean ing or
for re place ment of O-rings or other parts. Sec tion 5.2 pro vides gen eral work ing guide lines and de scribes the
pro ce dures for re mov ing the source from the vac uum sys tem and dis as sem bling its ma jor com po nents, leav -
ing only the emit ter as sem bly, the bear ing hous ing as sem bly, and the drive as sem bly still in tact. Sec tion 5.3
de scribes how the bear ing hous ing as sem bly is dis as sem bled, and Sec tion 5.4 pro vides the same in for ma tion
for the drive as sem bly. Dis as sem bly in struc tions for the high-per for mance emit ter ap pear in Sec tion 5.
STIH-270-2PT 0101-9004-0A 5-1