DANGER: HIGH VOLT AGE
On manually driven systems, the knob or crank for rotating the
source must NOT be mounted in a position that would place an
operator in proximity to any high-voltage component. Injuries
resulting from high-voltage shocks can be extremely severe, even
lethal.
•
A wa ter-flow switch that can be con nected to the gun wa ter in ter lock on the e-beam power sup ply.
This switch should be set up so that the in ter lock is made only as long as the wa ter pres sure re mains
above 3.0 gal lons per min ute (gpm). A suit able wa ter-flow switch is in cluded with the Temescal’s
air/wa ter feedthrough kit when that feedthrough is or dered un der PN 0629-0780-2.
•
A pres sure in ter lock that will pre vent the high volt age and the fil a ment cur rent from be ing on when the
vac uum cham ber’s pres sure is higher than 5
×
10
-4
torr.
Op tional Ac ces sories
The fol low ing items may be re quired for op er a tion of the source, de pend ing on the ap pli ca tion and on other
in stal la tion de tails.
•
Any ad di tional in ter lock switches deemed nec es sary or de sir able by the user.
•
A source shut ter as sem bly, con sist ing of a shut ter arm and a shut ter, plus a ro tary-mo tion feedthrough
for the shut ter drive, a shut ter ac tu a tor mech a nism, and a shut ter con trol ler. (See Sec tion 1 for or der ing
num bers.)
•
Some form of shield ing to pre vent loose ma te rial in the vac uum cham ber from com ing into con tact
with high-volt age com po nents. Over a pe riod of time, evaporant ma te rial ac cu mu lates on the in ner
sur faces of the cham ber. As this ma te rial flakes off, some of it will fall onto high-volt age com po nents
un less they are shielded, re sult ing in se vere arc ing. The pref er a ble so lu tion is to in stall full de bris
shields, which fit tightly around the top of the source and ex tend to the cham ber walls. If your sys tem
will not have full de bris shields, then it is es sen tial to in stall a smaller shield like that shown in Fig ure
2-2 over the high-volt age leads.
•
A shield for sec ond ary elec trons. When the source is used to evap o rate ma te ri als with high atomic
weights, such as tung sten or gold, nu mer ous elec trons may bounce off the evaporant pool and be de -
flected over the rear of the gun. These elec trons, which are known as sec ond ary elec trons, may strike
the wa ter lines or the nearby cham ber wall, dam ag ing ei ther or both over time. If your ap pli ca tion en -
tails this haz ard, a cop per shield should be mounted so that it ex tends above the rear of the source.
•
A mag netic shield, if two sources are be ing in stalled on one source tray. The pur pose of this shield is to
pre vent mu tual mag netic in ter fer ence be tween the two sources. It should be made of thin sheets of
mumetal and stain less steel loosely bolted to gether. Fig ures 2-5 and 2-6 il lus trate two meth ods of in -
stall ing such a shield.
Source Cooling Wa ter
Cooling wa ter at 20°C must be sup plied to the source at a min i mum rate of 3.0 gpm.
CAU TION
Inadequate water flow may result in severe damage to the crucible.
Damage resulting from an inadequate supply of cooling water is not
covered by the gun’s warranty.
Installation
STIH-270-2PT
0101-9004-0A
2-3
Содержание Temescal SuperSource2 STIH-270-2PT
Страница 54: ...Operation 3 18 0101 9004 0A STIH 270 2PT...
