BOC Edwards Temescal SuperSource2 STIH-270-2PT Скачать руководство пользователя страница 26

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Figure 2-1. Installation Details

Installation

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0101-9004-0A

STIH-270-2PT

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Содержание Temescal SuperSource2 STIH-270-2PT

Страница 1: ...Temescal SuperSource2 PopTop Electron Beam Turret Source Model STIH 270 2PT Temescal a division of BOC Edwards Inc 4569C Las Positas Road Livermore CA 94551 Tel 925 371 4170 Fax 925 449 4096...

Страница 2: ...V D 0 First released version of manual Model STIH 270 2PT sources beginning with SN 1 6 02 1 Second released version of manual Corrections and updates 4 06 Temescal A division of BOC Edwards Inc 4569C...

Страница 3: ...aintenance of High Performance Emitter Assembly 4 1 Section Overview 4 1 4 2 Filament Replacement 4 2 4 3 Emitter Disassembly 4 4 4 4 Emitter Reassembly 4 5 Section 5 Source Disassembly 5 1 Section Ov...

Страница 4: ...iver 5 5 5 3 Socket head screw correctly retained by the sleeve on the end of the Allen driver 5 5 5 4 Removing the screws that secure the crucible to the crucible mounting flange 5 6 5 5 Removing the...

Страница 5: ...Seller s ex pense This mechanical warranty shall be void and the apparatus shall be deemed to be purchased AS IS in the event that the entire purchase price has not been paid within thirty 30 days of...

Страница 6: ...days after initialshipmentto Purchaser to the address des ignated by Seller during normal business hours transportation charges prepaid and z upon exami nation and testing by Seller the apparatus mus...

Страница 7: ...o de termine the proper electrical ground for high voltage components 6 Before servicing any high voltage component switch off the electrical power at the component s main power switch This switch sho...

Страница 8: ...upply Screens protecting extra high voltage conduc tors should be removed only if appropriate action has been taken to ensure that extra high voltage conductors are dead and cannot be re energized ina...

Страница 9: ...be used Parts that are broken missing plainly worn distorted or contaminated shall be replaced immediately Should such repair or replacement become necessary a telephonic or written request for servi...

Страница 10: ...Mine Safety and Health Administration MSHA b Some substances are toxic and inhaling them should be avoided Take steps to ascertain whether or not the material being deposited is a known toxic substanc...

Страница 11: ...ntheship ping container both forguns shipped fully assembled and for guns shipped as a base unit plus components Sec tion 1 3 provides a general product description along with information on ordering...

Страница 12: ...Allen driver with specially machined sleeve one 10 24 1 stainless steel thumbscrew If you have purchased a kit with a base unit plus components the shipping container should contain the items listed...

Страница 13: ...the crucible and adja cent structures particularly the cut out above the exposed pocket On conventional turret sources it can be difficult to remove deposited evaporant along this cut out without ris...

Страница 14: ...y a set of electromagnetic deflection coils mounted in the front end of the source These fields also affect the beam s shape and concentration which are further influenced by two sets of adjustable po...

Страница 15: ...net benefits for the user are improved uniformity and reliability Drive Assembly The source is designed so that when one pocket is in the home position the others are shielded by the cruci ble cover...

Страница 16: ...ockets 0715 8494 0 three 15 cc pockets one 25 cc pockets 0715 8484 0 three 25 cc pockets one 15 cc pocket 0715 8244 0 one 7 cc pocket one 15 cc pocket two 25 cc pockets 0715 8474 0 SIX POCKET CRUCIBLE...

Страница 17: ...Sweep capability Longitudinal and lateral when operated with a sweep controller Installation requirements Power Filament current 70 A at 12 V ac Emission current 0 1 5 A at 4 10 kV dc 10 kW max Cooli...

Страница 18: ...Description and Specifications 1 8 0101 9004 0A STIH 270 2PT Figure 1 3 Dimensions of STIH 270 2PT source top side and front views...

Страница 19: ...pocket se lection forward and reverse rotation and electronic phase adjustment via its front panel The TRC 3460 can be configured for use with a wide variety of crucibles including 4 6 and 8 pocket c...

Страница 20: ...serts machined from solid rod molybdenum When con sidering the use of these liners users should be aware that some metals alloy with molybdenum 2 Tungsten In most respects tungsten liners are suitable...

Страница 21: ...fications and instructions carefully before installing the source The installation procedures and safety precautions described below are very specific and must be adhered to closely Taking a casual at...

Страница 22: ...oil Available from Temescal order PN 6342 1916 1 High temperature lugs for connecting the Kapton wire to the terminals on the deflection coil Avail able from Temescal order PN 6044 0359 0 Bare 6 AWG f...

Страница 23: ...accumulates on the inner surfaces of the chamber As this material flakes off some of it will fall onto high voltage components unless they are shielded resulting in severe arcing The preferable soluti...

Страница 24: ...up to 1 5 A of emission current at 4 10 kV dc 10 kW max A separate circuit must supply up to 4 A ac at 13 V ac to the gun s deflection coils On systems without beamsweep control this power issupplied...

Страница 25: ...rength electron beam can be directed toward those areas The result could be severe injury to anyone looking through the viewport The top is down switch must be adjusted so that the switch changes stat...

Страница 26: ...t i m e d n a h t f e L r a b s u b e g a t l o v h g i H s d a e l l i o c n o i t c e l f e D s l a n i m r e t e g a t l o v h g i H s h g u o r h t d e e f e d i s e c r u o S t f a h s e v i r d...

Страница 27: ...eads the probable results included erratic beam position control and damage to other system components Beam sweep controllers are particularly vulnerable to the effects of high voltage interference an...

Страница 28: ...d other in vacuum components Procedure 2 Mount the Source 1 Once you have determined the optimal mounting location for the source mark the locations for the mounting holes using the holes in the mount...

Страница 29: ...to reach the threaded unions on the gun s water lines and the air lines are long enough to reach the air cylinder ports at the base of the gun If it appears that these air and water lines will be lon...

Страница 30: ...ION 1 To ensure proper cooling the water lines MUST be connected as shown in Figure 2 1 with the supply line connected to the gun s lower external water junction and the return line connected to the g...

Страница 31: ...k onto the bot tom of the feedthrough Note that the shaft in the center of the feedthrough is keyed so that the con nector can only go on one way 7 If necessary tighten the clamp screws on the bottom...

Страница 32: ...ctions on making these connections refer to the manual for the external device CAUTION If the device supplying the deflection coil current is either an e beam power supply or a non bipolar beam sweep...

Страница 33: ...ld should be made of type 304 stainless steel and it should be placed so that no part of it iscloser than 1 4 to either ofthe high voltagefeedthroughs There should be no grounded compo nents within th...

Страница 34: ...rounding point which should be somewhere on the vacuum cabinet 3 Silver solder the other end of this grounding strap to the rods DO NOT rely on mechanical connections POWER MODULE OF HV POWER SUPPLY V...

Страница 35: ...umetal and stainless steel shield must not interfere with the operation of the dynamic parts in the PopTop source Figures 2 5 and 2 6 illustrate two methods of mounting such a shield assembly Installa...

Страница 36: ...16 0101 9004 0A STIH 270 2PT Figure 2 6 Magnetic shield mounted to debris shield in two gun installation Angle bracket attached to debris shield Angle bracket attached to magnetic shield Debris shield...

Страница 37: ...procedures These three subsections are provided as general guidelines to the subjects they cover actual operating procedures will vary depending on the details of your installation and application s N...

Страница 38: ...r sup ply AlthoughtheSuperSource2canbeoperatedatanyaccelerationvoltagebetween4kVand10kV thepermanent magnet is gaussed for operation at a specific acceleration voltage value On the standard model STIH...

Страница 39: ...this current which is termed the gun current or the filament current is set via the e beam power supply s gun control circuit Even if you are adjusting the filament current an emission current readou...

Страница 40: ...iece extensions are ad justed all the way in toward the center of the source As the extensions are adjusted outward the spot becomes larger less dense less uniform In addition as the extensions are ad...

Страница 41: ...s to the sides of the source Then move the two extensions equal distances in the desired direction and retighten their mounting screws NOTE The internal pole piece extensions are made with a step in t...

Страница 42: ...e tube line if they are easily accessible The speed controllers should be set 1 4 to 1 3 turn from fully closed Note at the bottom of the air feedthrough that one of the tubes is very short This tube...

Страница 43: ...hat the emission current is set for 20 mA or less before you switch on the filament current Failure to do so could result in damage to the source The safest way to ensure that this is the case is to t...

Страница 44: ...copper If the source is controlled by a sweeper then check the position interlock limits in both axes If the limits are not set properly switch off the high voltage and the filament current and follo...

Страница 45: ...factors The user must therefore set the schedule for this inspection 1 Perform the checks described above 2 Check all feedthroughs for fouled components and clean any that are found 3 Remove the emitt...

Страница 46: ...the metal surface enough to cause arcing in the chamber After using the emery paper remove resi dues from thesepartsby thoroughly cleaning them either ultrasonically or using isopropyl alcohol 8 Once...

Страница 47: ...ced A backing wrench to prevent loosening of the spider plate and push rod connection should be used on the hex portion of the push rods when removing the cover screws To remove the cover command the...

Страница 48: ...the crucible cover as cooling water does not flow through the cover 2 Check the crucible and cover for flakes of debris and excessive evaporant buildup Pay especially close attention to the barriers b...

Страница 49: ...ve the screws that secure the crucible to the crucible mounting flange To do so use the special Allen tool provided with the source This tool consists of a standard 7 64 Al len driver with a machined...

Страница 50: ...ribed below in removing the crucible mounting screws The compressed O ring exerts considerable upward force against the crucible and the counter pressure exerted by the mounting screws must be relieve...

Страница 51: ...the crucible If scraped against the stainless steel water baffle protruding beneath the exposed pocket this surface can easily be scratched deeply enough that the O ring in the crucible mounting flang...

Страница 52: ...it may not be possible to retrieve them without disassembling the source further For best results make sure each screw is held by the special Allen tool as shown in Figure 3 5 before attempting to in...

Страница 53: ...ess the O ring As you do so work your way around the periphery of the crucible in a star shaped pattern tightening all sides evenly and gradually 5 Rotate the crucible so that the other two screw hole...

Страница 54: ...Operation 3 18 0101 9004 0A STIH 270 2PT...

Страница 55: ...theemitter and replace any that show signs of thread damage or dis tortion Damaged screws are likely to becomefrozen in place during subsequent sourceoperation resulting in breakage or thread strippi...

Страница 56: ...7 Disconnectthehigh voltageleadsfromeitherthefilamentbusbarsorthehigh voltagefeedthroughs 8 Remove the knurled thumbnut that secures the emitter assembly to the gun s baseplate 9 Pull the emitter str...

Страница 57: ...mmeter to check the continuity between the filament clamps The meter should show little or no resistance i e not more than 0 3 ohms between the clamps If the meter indicates infinite re sistance the f...

Страница 58: ...beam formers 6 Remove the four screws that secure the filament bus bars the cathode blocks and the cathode block insulator to the emitter mounting bar 7 Remove the two screws that secure the emitter m...

Страница 59: ...left hand cathode block in place on the emitter mounting bar 3 Put the left hand filament bus bar in place atop the left hand cathode block 4 Install and tighten the 3 8 long screws that attach the l...

Страница 60: ...to the emitter support bar 21 Look into the gap between the forward facing surfaces of the beam formers and the anode to verify that this gap varies by no more than 0 010 Then check the parallelism of...

Страница 61: ...re 4 1 Front view of high performance emitter assembly Filament bus bars Emitter support bar Filament legs Filament clamp screws Anode Figure 4 2 High performance emitter viewed from rear Emitter supp...

Страница 62: ...Maintenance of High Performance Emitter Assembly 4 8 0101 9004 0A STIH 270 2PT Figure 4 3 Exploded view of high performance emitter...

Страница 63: ...Section 5 2 provides general working guidelines and describes the procedures for removing the source from the vacuum system and disassembling its major components leav ing only the emitter assembly t...

Страница 64: ...wer and water from the source and removing it from the vacuum chamber 1 Touch the grounding hook to the high voltage feedthroughs if you have not done so im mediately previous to beginning this proced...

Страница 65: ...rive assembly Sections 5 3 and 5 4 describe the disassembly of the bearing housing assembly and the drive assembly respectively In general it is best to avoid disassembling anything that does not have...

Страница 66: ...s mounting screws Note orientation of sealing disk Step 6 To remove the piston and bellows from the cylinder use a 7 8 wrench on the machined hex of the bellows and a 5 32 Allen key wrench on the bot...

Страница 67: ...step 10 of this procedure Source Disassembly STIH 270 2PT 0101 9004 0A 5 5 Figure5 2 Detail of the sleeve on the Allen driver Figure 5 3 Socket head screw correctly retained by the sleeve on the end o...

Страница 68: ...st be relieved evenly to prevent damage to the screws or the threads in the crucible mounting flange a Remove the two screws in the back of the crucible b Rotate the crucible 180 and loosen the six re...

Страница 69: ...ar as possible down over thehead ofeach screw before inserting it into place as shown in Figure 5 3 Follow these steps when re installing a crucible a Position the crucible mounting flange so that you...

Страница 70: ...ove the two screws that secure the coil shield to the source Then remove the coil shield and pull the coil assembly straight out of the coil housing Step 15 If this is a side drive gun remove the scre...

Страница 71: ...the right hand pole piece Step 20 You should now be able to lift the coil housing free of the pole pieces as shown in Figure 5 9 If not further loosen the bottom row of screws that secure one of the...

Страница 72: ...pole piece with the other as shown in Figure 5 11 Then swing the front of the pole piece away from the source and carefully sepa rate it from the rear edge of the magnet rocking it slowly up and down...

Страница 73: ...m the base plate To do so push it to one side and then swing it up by raising the end that now extends beyond the side of the base plate CAUTION To minimize the risk of degaussing the magnet always pl...

Страница 74: ...the base plate Then you can remove the bearing hous ing assembly which contains the pivot shaft from the source Source Disassembly 5 12 0101 9004 0A STIH 270 2PT Figure 5 12 Removing the water baffle...

Страница 75: ...ent en sures that the bearing housing assembly can be mounted in only one orientation that is with the water baffle point toward the front of the source When reassembling make sure that you can see al...

Страница 76: ...the following subassemblies still intact 1 The emitter assembly see section 4 3 for disassembly instructions and parts illustration 2 The bearing housing assembly see section5 3 fordisassemblyinstruc...

Страница 77: ...r e d i p S e t a l p s t e k c a r b t i m i L H R d n a H L r e v e l r e l l o R h c t i w s p u k c a B r e h s a w D I 6 1 3 1 6 1 1 g n i r O g n i r a e B g n i s u o h y l b m e s s a e l b i...

Страница 78: ...32 CS 799 6156 1210 0 Switch Simulated roller lever 800 0627 2613 0 Weldment Bellows SST PopTop 801 0627 2663 0 Weldment cylinder Pneumatic 802 0627 2652 0 Clamp Ring Bellows SST Ref Item Number Descr...

Страница 79: ...remove it from around the pivot shaft see Figure 5 16 Step 3 Remove the pivot shaft upper and lower bearings and bearing spacer from the bearing housing Figure 5 17 shows these parts laid out in order...

Страница 80: ...the drive gear from the crucible mounting flange Step 1 Using the correct mounting screws loosely secure the drive gear to the crucible mounting flange so that the gear can still be moved about sligh...

Страница 81: ...nge upside down on a clean work surface i e with the counterbored seat for the quad ring facing upward Step 3 Liberally lubricate the quad ring with a low vapor pressure Apiezon L or equivalent When t...

Страница 82: ...me hold the mount ing flange in one hand and push the water baffle with one finger of the other hand to rotate the pivot shaft The quad ring should produce a light even resistance as the pivot shaft r...

Страница 83: ...s base leak rate Then repeat steps 2 4 If the base leak rate is still high when you repeat step 2 then you can conclude that residual helium is building up within the detector during the testing proce...

Страница 84: ...prongs remove the retaining ring that holds the outer drive bearing in place in the bearing housing Step 2 Using a small flat bladed screwdriver pry up and outward on one point of the retaining ring t...

Страница 85: ...n place inside the drive bearing housing c Insert the drive shaft into the assembly d Replace the retaining ring that secures the drive shaft To do so place the points of the retaining ring against th...

Страница 86: ...haft assembly laid out in order of reassembly Drive shaft PN 0216 9202 0 Bearing housing PN 0412 1402 0 Drive shaft bearings PN 9120 1271 0 Retaining ring for drive shaft PN 1381 1032 5 Retaining ring...

Страница 87: ...ested corrective actions To facilitate your troubleshooting efforts these symptoms are classified according to type of malfunction and organized in the following subsections 7 2 Difficulties in genera...

Страница 88: ...un 2 Emission current is at maximum value and filament current is nominal but there is no high voltage a High voltage is shorted to ground a Check for broken insulators or shorted emitter filament lea...

Страница 89: ...he copper before op eration is resumed This can only be ac complished by glass bead honing the crucible b Inadequate cooling of exposed pocket b Check to see that the gun s cooling water is chilled to...

Страница 90: ...il current applied If spot is too far toward rear of source see Figure 6 1 replace permanent magnet or have it regaussed c Magnetic interference from another e beam source mounted in the same chamber...

Страница 91: ...ak Lower acceleration voltage or have Correct beam spot position beam strikes edge of pocket that is farthest from emitter Figure 6 1b Correct and incorrect beam spot positions on sources designed for...

Страница 92: ...s not aligned exactly between the pole pieces b Make sure that the filament is posi tioned correctly and that it is not warped or sagging c Pole pieces or pole piece extensions are damaged c Examine t...

Страница 93: ...nent magnet s field is too strong a Mount shunt bars on source as needed see section 3 2 9 Beam position is too far toward rear of source a Permanent magnet is too weak a Check beam spot position with...

Страница 94: ...nt applied If spot is too far toward rear of pocket see Figure 6 1 re place permanent magnet or have it regaussed b Magnet has been dropped or struck against a hard surface b Check beam spot position...

Страница 95: ...ing housing assembly Check the condition of its bearings the pivot shaft and the bronze washer that sandwiches the quad ring seated in the crucible mounting flange Replace any parts that show signs of...

Страница 96: ...and adjust air pressure b Electrical signal not getting to Air sole noid valve b Check and correct signal problem c Air valve solenoid is not functioning properly c Check valve for proper function an...

Страница 97: ...ter crucible 0626 4365 0 Parts list for base unit This documentation is intended to facilitate maintenance troubleshooting and the ordering of replacement parts It covers the base unit minus emitter a...

Страница 98: ...E GAP BETWEEN SOURCE COVER AND THE TOP OF THE CRUCIBLE WEB TO BE 0005 005 13 APPLY PARKER O LUBE GENEROUSLY TO O RING INSIDE SURFACE OF CYLINDER AND TO PISTON SHAFT ALL METAL SURFACES OVER WHICH O RIN...

Страница 99: ...9 6 32 SOCKET HD SCREW VIEW D V LINE E LINE R LINE SIZE CAGE CODE DWG NO REV SCALE SHEET E 0626 4365 B 2 OF 2 1 1 THIS DOCUMENT CONTAINS CONFIDENTIAL OR PROPRIETARY INFORMATION OF BOC COATING TECHNOLO...

Страница 100: ...412 1482 1 MAGNET SHLD STIH2702 FOR 2 PT 1 00 EA 412 1482G 017 0413 3902 0 MAGNET STIH270 2M 1 00 EA 413 3902B 018 0030 1062 0 BRACKET SINGLE MAGNET 2 00 EA 030 1062A 019 0626 4355 0 BASE PLT FOR THE...

Страница 101: ...0 EA 720 1321 1555 4 SCREW FLAT HD SOC 10 32X 50 4 00 EA 721 1321 1459 2 SCREW SOC HD THD VNT 8 32X1 00 6 00 EA 722 1321 1454 3 SCREW BUTTON HD SOC 8 32X 375 6 00 EA 723 1321 1510 0 SCREW SOC HD THD V...

Страница 102: ...NG MTG FL 1 00 EA 214 9272B 903 0214 9281 0 SPACER STIH 270 3 1 00 EA 214 9281A 905 0412 1323 0 CRUCIBLE MTG FLANGE 1 00 EA 412 1323E 906 0412 1333 0 PIVOT SHAFT STIH270 2 SPECIAL 1 00 EA 412 1333J 90...

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