AIXTRON
- Dokumentation
CONFIDENTIAL
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System Manual
Maintenance
CRIUS II
Maintenance schedule
6.3.8
Maintenance schedule: Pneumatic system
Tab. 6-9
Maintenance schedule: Pneumatic system
6.3.9
Maintenance schedule: Gas mixing system
Tab. 6-10
Maintenance schedule: Gas mixing system
6.3.10 Maintenance schedule: Cooling water system
Tab. 6-11
Maintenance schedule: Cooling water system
Action
Interval
Comments
Date and signa-
ture
Checking the pneumatic tub-
ing,
if necessary replace defective
hoses
Quaterly
Checking the working pres-
sure
Quaterly
Checking the pressure switch
Quaterly
Checking the EPV valves
Yearly
Action
Interval
Comments
Date and signa-
ture
Replacing a bubbler
Depends on
consumption
Checking the communication
Daily, during
operation
Performing a zero offset of a
MFC
Quaterly
Performing a leak test of the
complete system
Quaterly
Perform the leak test accord-
ing to the SEMI standard
Action
Interval
Comments
Date and signa-
ture
Checking the water pressure
Weekly
Cleaning the water filter
Quaterly
Checking the water flows
Before start-
ing a process
run