Measuring system XS22-E2010
1 Introduction
5
XS22_E2010
1 Introduction
1.1 How to use this manual
This manual describes composition, mode of operation and use of the
oxygen measuring system for vacuum processes (VMS) developed by
ZIROX GmbH.
Address of manufacturer:
ZIROX Sensoren & Elektronik GmbH
Am Koppelberg 21
D-17489 Greifswald
Tel.: (0 38 34) 8309-01
Fax: (0 38 34) 8309-29; e-mail: [email protected]
The manufacturer guarantees that this manual was written in accordance
with the functional and technical features of the delivered oxygen measuring
system.
This manual is not subject to the amendment service. If the manufacturer
modifies the VMS with the aim of making technical improvements, the user
is responsible for inserting the additional or updated pages supplied.
Proper operation of the VMS can only be ensured if the contents of this
manual are known. Therefore, all chapters of this manual must be read
carefully prior to operating the VMS.
Pages, charts and figures are numbered consecutively.
1.2 Copyright
This equipment manual is copyright protected.
It must not be partially or completely reproduced, copied, or distributed,
without prior written permission of the manufacturer. The use for competitive
advantages or the distribution to third parties are not authorized either.
All rights reserved.
1.3 Commonly used symbols
Symbol for imminent danger:
This symbol refers to imminent danger to persons’ life and health.
In case of disregard fatal injuries may result.
Symbol for indirect danger:
This symbol indicates indirect danger.
The degree of the damage depends on the circumstances and the actions of
the persons involved.
In case of disregard destruction or damage of the measuring probe, the
electronics assembly or other material assets as well as minor injuries may
result.
danger
attention
Summary of Contents for XS22
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