ZIROX XS22 Manual Download Page 1

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ZIROX Sensoren & Elektronik GmbH

Am Koppelberg 21, D-17489 Greifswald

+49 (0) 3834 8309-00, Fax: -29 E-mail: [email protected]

ZIROX Oxygen Measuring Technology

Measuring System

Vacuum probe XS22

Electronic unit E2010

for oxygen measurements in vacuum applications

Manual

Operating voltage: 24 V DC

Summary of Contents for XS22

Page 1: ...rg 21 D 17489 Greifswald 49 0 3834 8309 00 Fax 29 E mail info zirox de ZIROX Oxygen Measuring Technology Measuring System Vacuum probe XS22 Electronic unit E2010 for oxygen measurements in vacuum appl...

Page 2: ...2 XS22_E2010...

Page 3: ...n 13 5 1 Installation 13 5 2 Reference air supply for ZIROX probes 13 5 3 Probe mounting 13 5 4 Waiting for operating state 13 6 Parametrization 14 6 1 Menu operation an example 14 6 2 Display 14 6 3...

Page 4: ...4 XS22_E2010...

Page 5: ...nly be ensured if the contents of this manual are known Therefore all chapters of this manual must be read carefully prior to operating the VMS Pages charts and figures are numbered consecutively 1 2...

Page 6: ...pical examples are Measurings in vacuum processes PVC CVD other plasma processes Measurings in process gases conducted under non standard pressure e g surface treatment processes Measurings in science...

Page 7: ...gases with high thermal conductivity e g H2 He NH3 at ambient pressure The sensor element of the vacuum probe consists of a partially closed solid electrolyte tube The reference electrode and a resis...

Page 8: ...at flange Diameter of the probe 16 mm Length of the probe 140 300 mm User specific Thermocouple Type B Heater voltage 24 V Approx 30 W Adjusted 17 W Heater resistance 20 Installation requirements DN2...

Page 9: ...ee IP 30 Front IP52 Working temperature 0 40 C Storage temperature 0 50 C Set temperature 700 C Display Double spaced LCD display 2 x 16 digits Input signal Sensor and thermoelectric Output signal 4 2...

Page 10: ...on and operation of E2010 4 1 Front keys The display and the keys for parametrization are located on the front Menu key scroll or select the requested parameter ENTER key activate or enter adjusted pa...

Page 11: ...and outputs are located on the rear Figure 3 Rear view E2010 with connections Terminal strip X1 probe connections Terminal strip X2 Power supply output signal Pin Description Cable 1 AINCOM brown 2 V...

Page 12: ...06 105 ppm O2 Oxygen concentration in ppm A1CR A1xxx xCR A120 9 20 9 mV Cell voltage in mV A2CR A2xxx xCR A2749 9 749 9 C Measuring temperature in C The parameters are set by the keys of the front cov...

Page 13: ...the manufacturer After starting the system E2010 with connected sensor the reference air flow must be checked by an inserted flow meter 5 10 l h resp approx 100 200ml min and if applicable adjusted v...

Page 14: ...er 4 1 With help of both keys an offset calibration zero point calibration in clean air and a span gas calibration is possible The complete menu is shown schematically in figure 4 p 18 The sensor can...

Page 15: ...ng parameters are adjustable in the menu SETTINGS OUTPUT VALUE Valid for display and analog output Vol O2 Vol ppm O2 mbar O2 atm O2 Vz mV OUTPUT VALUE log 10 linear for Vz linear only OUTPUT 4 20 mA C...

Page 16: ...the measuring gas With the zero calibration the working point in ambient air is calibrated with 20 64 vol O2 6 5 Span gas calibration After calling the SPAN GAS concentration in the calibration menu...

Page 17: ...Measuring system XS22 E2010 6 Parametrization 17 XS22_E2010 6 8 Menu navigation of calibration diagram Fig 4 Diagram offset and span gas calibration...

Page 18: ...atus 18 XS22_E2010 7 Status display error messages No Display LED red LED green 1 OK off on 2 Limit value on on 3 Probe temperature 700 C flashing off 4 Thermocouple broken 5 System error In status 3...

Page 19: ...causes Fault clearance Red LED off no supply voltage No supply voltage at the probe Check power supply Internal fuse switched off Send probe to service Green LED off no ready signal Probe is too coole...

Page 20: ...20 XS22_E2010...

Page 21: ...al pressure of oxygen at reference electrode pO2 measuring gas partial pressure of oxygen at measuring electrode After inserting the known values of the natural constants the following applies 42 46 e...

Page 22: ...different pumps over the pressures measured in a higher pressure range with a capacity meter in the medium pressure range with the Pirani device and in the lower pressure range at a cold cathode The j...

Page 23: ...icient to determine the probe signals empirically in a successful trial The operating mode has to be set up so as to receive the requested probe signal Due to different parameter impacts on the raw si...

Page 24: ...24 XS22_E2010...

Page 25: ...ot permitted either A connection of ZIROX and non ZIROX products voids any warranty claims Warranty and warranty claims are only accepted if they are in accordance with the General Sales and Delivery...

Page 26: ...26 XS22_E2010...

Page 27: ...Measuring system XS22 E2010 11 Declaration of conformity 27 XS22_E2010 11 Declaration of conformity...

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