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Measuring system XS22-E2010  

10 Warranty 

 

25 

XS22_E2010 

10  Warranty 

ZIROX Sensoren & Elektronik GmbH warrants that the products manufactured and 
sold are free from manufacturing and material defects at the time of dispatch. In 
case  of  defects  and faults  within  12 months  (probe)  and  24 months (electronics 
assembly) respectively after dispatch, ZIROX will clear faults at its own option by 
repair or replacement. The purchaser must give prompt written notice to ZIROX. 
The purchaser is not entitled to claim other legal remedies based on this warranty. 

ZIROX does not warrant supplied products which are subject to normal wear and 
tear (e.g. reference gas pump). 

Corrosive  gases  and  solid  particles  may  cause  damage  and  require  repair  or 
replacement due to normal wear and tear. 

The  contact  of  the  products  with  explosive  gas  compounds,  halogens  in  high 
concentrations and sulphuric gases (e.g. SO

2

) is not permitted.  

The contact of the products with siliconic or phosphoric compounds is not permitted 
either.  

A connection of ZIROX and non-ZIROX products voids any warranty claims. 

Warranty and warranty claims are only accepted if they are in accordance with the 
"General Sales and Delivery Conditions" of the manufacturer. 

Warranty and liability claims for damage to persons and/or property are void if they 
are subject to the following: 

  Normal wear and tear 

  Improper use of the product 

  Disregard of the manual’s instructions 

  Improper installation, initiation, operation and maintenance of the product 

  Operation of the product without protective measures 

  Unauthorized functional and technical modification of the product 

  Dismantling of parts as well as installation of spare parts or additional units 

which are not delivered or permitted by the manufacturer 

  Improper repairs or faulty operation 

  External impact 

  Acts of God 

   

Note:

  During  installation  of  the  equipment,  the  customer  must  ensure  that  all 

necessary supply lines are connected and the operating temperature of the probe 
is reached. Experience has shown that products installed but not in use may be 
damaged  by  the  process  or  by  external  influence.  ZIROX  will  not  accept  any 
responsibility for such damage.

Summary of Contents for XS22

Page 1: ...rg 21 D 17489 Greifswald 49 0 3834 8309 00 Fax 29 E mail info zirox de ZIROX Oxygen Measuring Technology Measuring System Vacuum probe XS22 Electronic unit E2010 for oxygen measurements in vacuum appl...

Page 2: ...2 XS22_E2010...

Page 3: ...n 13 5 1 Installation 13 5 2 Reference air supply for ZIROX probes 13 5 3 Probe mounting 13 5 4 Waiting for operating state 13 6 Parametrization 14 6 1 Menu operation an example 14 6 2 Display 14 6 3...

Page 4: ...4 XS22_E2010...

Page 5: ...nly be ensured if the contents of this manual are known Therefore all chapters of this manual must be read carefully prior to operating the VMS Pages charts and figures are numbered consecutively 1 2...

Page 6: ...pical examples are Measurings in vacuum processes PVC CVD other plasma processes Measurings in process gases conducted under non standard pressure e g surface treatment processes Measurings in science...

Page 7: ...gases with high thermal conductivity e g H2 He NH3 at ambient pressure The sensor element of the vacuum probe consists of a partially closed solid electrolyte tube The reference electrode and a resis...

Page 8: ...at flange Diameter of the probe 16 mm Length of the probe 140 300 mm User specific Thermocouple Type B Heater voltage 24 V Approx 30 W Adjusted 17 W Heater resistance 20 Installation requirements DN2...

Page 9: ...ee IP 30 Front IP52 Working temperature 0 40 C Storage temperature 0 50 C Set temperature 700 C Display Double spaced LCD display 2 x 16 digits Input signal Sensor and thermoelectric Output signal 4 2...

Page 10: ...on and operation of E2010 4 1 Front keys The display and the keys for parametrization are located on the front Menu key scroll or select the requested parameter ENTER key activate or enter adjusted pa...

Page 11: ...and outputs are located on the rear Figure 3 Rear view E2010 with connections Terminal strip X1 probe connections Terminal strip X2 Power supply output signal Pin Description Cable 1 AINCOM brown 2 V...

Page 12: ...06 105 ppm O2 Oxygen concentration in ppm A1CR A1xxx xCR A120 9 20 9 mV Cell voltage in mV A2CR A2xxx xCR A2749 9 749 9 C Measuring temperature in C The parameters are set by the keys of the front cov...

Page 13: ...the manufacturer After starting the system E2010 with connected sensor the reference air flow must be checked by an inserted flow meter 5 10 l h resp approx 100 200ml min and if applicable adjusted v...

Page 14: ...er 4 1 With help of both keys an offset calibration zero point calibration in clean air and a span gas calibration is possible The complete menu is shown schematically in figure 4 p 18 The sensor can...

Page 15: ...ng parameters are adjustable in the menu SETTINGS OUTPUT VALUE Valid for display and analog output Vol O2 Vol ppm O2 mbar O2 atm O2 Vz mV OUTPUT VALUE log 10 linear for Vz linear only OUTPUT 4 20 mA C...

Page 16: ...the measuring gas With the zero calibration the working point in ambient air is calibrated with 20 64 vol O2 6 5 Span gas calibration After calling the SPAN GAS concentration in the calibration menu...

Page 17: ...Measuring system XS22 E2010 6 Parametrization 17 XS22_E2010 6 8 Menu navigation of calibration diagram Fig 4 Diagram offset and span gas calibration...

Page 18: ...atus 18 XS22_E2010 7 Status display error messages No Display LED red LED green 1 OK off on 2 Limit value on on 3 Probe temperature 700 C flashing off 4 Thermocouple broken 5 System error In status 3...

Page 19: ...causes Fault clearance Red LED off no supply voltage No supply voltage at the probe Check power supply Internal fuse switched off Send probe to service Green LED off no ready signal Probe is too coole...

Page 20: ...20 XS22_E2010...

Page 21: ...al pressure of oxygen at reference electrode pO2 measuring gas partial pressure of oxygen at measuring electrode After inserting the known values of the natural constants the following applies 42 46 e...

Page 22: ...different pumps over the pressures measured in a higher pressure range with a capacity meter in the medium pressure range with the Pirani device and in the lower pressure range at a cold cathode The j...

Page 23: ...icient to determine the probe signals empirically in a successful trial The operating mode has to be set up so as to receive the requested probe signal Due to different parameter impacts on the raw si...

Page 24: ...24 XS22_E2010...

Page 25: ...ot permitted either A connection of ZIROX and non ZIROX products voids any warranty claims Warranty and warranty claims are only accepted if they are in accordance with the General Sales and Delivery...

Page 26: ...26 XS22_E2010...

Page 27: ...Measuring system XS22 E2010 11 Declaration of conformity 27 XS22_E2010 11 Declaration of conformity...

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