Zeiss Crossbeam 350, Instruction Manual

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ZEISS ​ Table of Contents​
Table of Contents
Glossary................................................................................................................. 6
1 General Information ............................................................................................. 8
1.1 Text Conventions and Link Types .......................................................................... 9
1.2 Explanation on Warnings and Additional Information ........................................... 9
1.3 Further Applicable Documents.............................................................................. 10
1.4 Contact ................................................................................................................ 11
2 Safety .................................................................................................................... 12
2.1 Intended Use ........................................................................................................ 12
2.2 Safety Procedures................................................................................................. 13
2.2.1
Safe Operation Conditions ....................................................................... 13
2.2.2 Requirements for Personnel ..................................................................... 13
2.2.3 Preventive Maintenance ........................................................................... 14
2.2.4 Safe Handling of Spare Parts .................................................................... 14
2.3 Prevention of Hazards .......................................................................................... 14
2.3.1
Biological Hazards.................................................................................... 14
2.3.2 Burn Hazards ........................................................................................... 14
2.3.3 Chemical Hazards..................................................................................... 14
2.3.4 Electrical Hazards ..................................................................................... 15
2.3.5 High Pressure Hazards.............................................................................. 15
2.3.6 Magnetic Field Hazards ............................................................................ 15
2.3.7 Mechanical Hazards ................................................................................. 16
2.3.8 Radiation Hazards .................................................................................... 16
2.3.9 Suffocation Hazards ................................................................................. 16
2.4 Safety Equipment ................................................................................................. 17
2.4.1
Protective Cover Panels ............................................................................ 17
2.4.2 Main Switch............................................................................................. 18
2.4.3 Emergency Off (EMO) Option................................................................... 18
2.4.4 Locking Devices ....................................................................................... 19
2.4.5 Lockout/Tagout Equipment ...................................................................... 20
2.4.6 Safety Labels............................................................................................ 20
3 Product and Functional Description ..................................................................... 24
3.1 System Overview .................................................................................................. 24
3.2 Main Components................................................................................................ 26
3.2.1
Vacuum System ....................................................................................... 26
3.2.2 Electron Optical Column | Gemini I ........................................................... 30
3.2.3 Ion-sculptor Focused Ion Beam (FIB) Column (Optional) ........................... 32
3.2.4 Detectors ................................................................................................. 34
3.2.5 Specimen Stage ....................................................................................... 39
3.2.6 Dual Joystick ............................................................................................ 40
3.3 Optional Components and Accessories ................................................................. 41
3.3.1
Optional Detectors................................................................................... 41
3.3.2 Control Panel ........................................................................................... 50
Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000 3