8 Troubleshooting | 8.7 Focused Ion Beam
ZEISS
CAUTION
Risk of injury: Isopropanol
Isopropanol is highly flammable and irritating to the eyes.
Vapors may cause drowsiness and dizziness.
4
Wear suitable gloves.
4
Keep away from sources of ignition.
4
Do not smoke.
4
In case of contact with the eyes, rinse immediately with plenty of water and seek medical
advice.
4
Avoid contact with skin.
4
Do not breathe vapor.
NOTICE
Risk of property damage: Unsuitable lubricants
When using unsuitable lubricants, the vacuum system may be contaminated.
4
Only use TEM oil 300 for lubricating.
1. Retract the respective detector.
2. Clean the rod with isopropanol with a clean, lint-free cloth.
3. Spread some drops of TEM oil 300 across the rod.
Use a clean, lint-free cloth.
8.7 Focused Ion Beam
8.7.1 Checking the Lifetime of the Ion Source
The ion source is a consumable that is used up during operation.
In order to keep track of the ion supply, the ion source lifetime needs to be checked regularly.
Info
When the lifetime of the ion source approaches 3000 μAh, contact the ZEISS service represen-
tative to have the ion source replaced.
1. In the
FIB Toolbar
, from the
FIB
drop-down list, select
FIB
.
à
The
FIB
tab of the
FIB Control Panel
is displayed.
à
The lifetime of the ion source is indicated as μAh.
2. Check the lifetime of the ion source.
104
Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000
