Zeiss Crossbeam 350, Instruction Manual

Page: 97 / 126

ZEISS 8 Troubleshooting | 8.1 Overview
Symptom Cause Measure
Stage does not move ac-
curately. Stage needs to be initialized. Refer to Initializing the Stage
[
}
98] .
Stored position of the
specimen stage cannot be
approached correctly. Absolute stage movement is
required. Stage needs to be
driven to a well-defined posi-
tion. Refer to Initializing the Stage
[
}
98] .
Under TV control, the di-
rection of dual joystick
movement and direction
of stage movement seem
to be different. TV joystick angle does not fit
for the selected CCD camera. Refer to Changing the Joystick
TV Angle [
}
99] .
Stage cannot be moved
by using the joystick. Joystick Disable checkbox is
activated.
Deactivate the checkbox in the
Stage tab of the Crossbeam
SEM Control panel.
Error message Stage
Board too hot (or simi-
lar) is displayed.
Flow of cooling water is not
OK. Refer to Checking the Water
Flow and Temperature
[
}
101] .
Touch alarm message is
displayed. Specimen or specimen holder
has touched objective or wall
of the specimen chamber. Refer to Resetting the Touch
Alarm [
}
100] .
Vac ready = OK is not
displayed after specimen
exchange.
System vacuum is bad due to a
vacuum leak at the chamber
door. Check the chamber door seal
for cleanliness.
If required, refer to Replacing
the Chamber Door Seal
[
}
100] .
Vac ready = OK is dis-
played very late after
specimen exchange.
Gas ballast at rotary pump or
scroll pump is activated. Deactivate gas ballast at the
pre-vacuum pump.
Microscope does not
vent. No nitrogen. Check nitrogen supply.
No compressed air. Check compressed air supply.
Vac ready = OK is dis-
played abnormally fast.
Penning gauge has not been
identified correctly. Restart the microscope.
If this does not solve the prob-
lem, contact your local ZEISS
service representative.
Gun vacuum is worse
than 8 to 9 × 10⁻⁹ mbar. The pumping capacity of the
ion getter pump decreases in
the course of time, thus deteri-
orating the gun vacuum. Refer to Baking out the Gun
Head [
}
101] .
Tab. 4: Troubleshooting
Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000 97