Zeiss Crossbeam 350, Instruction Manual

Page: 96 / 126

8 Troubleshooting | 8.1 Overview ZEISS
Symptom Cause Measure
Extractor target is not set to
an appropriate value. Change the extractor target.
Refer to
Manually Finding a
New Extractor Value [
}
105] .
Open the Gun Monitor and
record the parameters FIB
Suppressor Target and FIB
Emission I and send it to your
ZEISS service representative.
FIB: Suppressor voltage is
approaching 0 V or 2 kV. Ion source needs to be regen-
erated. Refer to Regenerating the Ion
Source by Heating [
}
105] .
FIB: Misalignment of
structures when milling
with different FIB probe
currents. Beam shift for the probe cur-
rents is not adjusted. Adjust the beam shift correc-
tion for the relevant FIB probe
currents.
Image quality gets worse,
but there is no change in
total emission current. Field emission gun has been
damaged due to arcing. Contact your local ZEISS ser-
vice representative to have the
field emission gun replaced.
Image is noisy and noise
reduction methods do
not help. Field emission gun is used up. Contact your local ZEISS ser-
vice representative to have the
field emission gun replaced.
Image is bad at low EHT
(e.g. 1 kV) Working distance is too long. Reduce the working distance
to a maximum of 7 mm.
InLens image is noisy. Working distance is too long. Reduce the working distance.
No InLens image can be
obtained. EHT exceeds 20 kV. Reduce EHT to a maximum of
20 kV.
Microscope is dead. Circuit breaker is tripped
(lower position). Refer to Checking the Position
of the Circuit Breakers [
}
103] .
Stored position of the
specimen stage cannot be
approached correctly. PC has crashed. Restart the PC.
Stage needs to be driven to a
well-defined position. Refer to Initializing the Stage
[
}
98] .
Gun is switched off auto-
matically. Gun has been switched off au-
tomatically for safety reasons
since gun vacuum is worse
than 2 × 10⁻⁸ mbar Refer to Baking out the Gun
Head [
}
101] .
SE image is noisy. Scintillator is used up. Contact your local ZEISS ser-
vice representative to have the
scintillator replaced.
Specimen current is low. Field emission gun is used up. Contact your local ZEISS ser-
vice representative to have the
field emission gun replaced.
Working distance is too short. Enlarge working distance to
about 5 mm or more.
Stage does not move. Stage needs to be initialized. Refer to Initializing the Stage
[
}
98] .
96 Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000