４７
６.
Maintenance Method
Vacuum pump
1. Maintenance
Check as follows at least once every three days during operation:
(1) Check for any abnormal sound.
(2) Check if the pump is abnormally hot.
(3) Check if exhaust is made correctly.
2. Regular inspection
(1) List of consumables
Parts
Quantity
Material
Reference life
Diaphragm
2
Synthetic rubber (EPDM)
10,000 H
Suction
・
exhaust
valves
4
Synthetic rubber (FPM)
10,000 H
Head gasket
2
Synthetic rubber (EPDM)
10,000 H
Bearing
1 set
10,000 H
(2) Guidelines for replacement
・
Diaphragm
Replace when the surface shows fine cracks, wear, hardening, deformation.
・
Suction
・
exhaust valves
Replace if they show any deformation, chipping, bend, etc.
・
Head gasket
Replace if it shows any hardening, crack, elongation.
・
Bearing
Request repair if grease shortage, abnormal sound, or abnormal motor vibration (chattering)
is detected.
3. Replacing the consumables
Caution
：
Be sure to turn OFF power supply to the unit before proceeding to replacement of
consumables.
When replacing, refer to the exploded diagram. Depending on the diassembling portion,
special tool may be necessary to handle a part of components.
(a) Replacing the diagram
Remove four cross-recessed pan-head machine screws
（
M4×12(with SW)
）
②
of the
pump head
①
.
Remove the pump head and remove one cross-recessed pan-head machine screw
（
M5×12
）
④
of the diaphragm holding plate
③
.
（
※
）
Replace a total of two diaphragms
⑤
, one for each pump head, with the new ones.
During reassembly, apply small amount (enough to cover three to four threads at the
end) of an agent to prevent loosening (Locktight 242, etc.) to cross-recessed
pan-head machine screws
（
M5×12
）
④
. Tighten screws with a torque of 4.0
～
4.5
N
・
m.