Yamato PDC610, Instruction Manual

Page: 2 / 46

Contents
1. Safety precautions ............................................................... 1
D
ESCRIPTION OF
W
ARNING
S
YMBOLS
.......................................................................... 1
A L
IST OF
S
YMBOLS
.................................................................................................... 2
W
ARNING AND
C
AUTION
.............................................................................................. 3
2. Before operating the unit .................................................... 4
P
RECAUTIONS FOR
I
NSTALLATION
................................................................................ 4
3. MAIN APPLICATIONS ........................................................... 5
A
PPLICATIONS
............................................................................................................ 5
4. COMPONENTS AND FUNCTIONS ....................................... 6
M
AIN
U
NIT
................................................................................................................. 6
B
ACK OF THE
M
AIN
U
NIT
............................................................................................. 7
5. INSTALLATION METHOD ..................................................... 8
R
EQUIRED
E
QUIPMENT
/ M
ETHODS TO
C
ONNECT
C
ABLES AND
T
UBES
............................ 8
6. INSTALLING ELECTRODES ................................................ 9
L
IST OF ELECTRODE RELATED ACCESSORIES
................................................................. 9
I
NTERNAL STRUCTURE AND OF THE CHAMBER AND PARTS NAMES
.................................. 10
W
HEN ONE
-
STAGE ELECTRODE IS USED
...................................................................... 11
W
HEN
2-
STAGE ELECTRODE IS USED
（
INSTALLATION OF ELECTRODES
）
...................... 12
W
HEN
2-
STAGE ELECTRODE IS USED
（
RIE
MODE
）
.................................................... 13
W
HEN
2-
STAGE ELECTRODE IS USED
（
DP
MODE
）
..................................................... 14
W
HEN
3-
STAGE ELECTRODE IS USED
（
INSTALLATION OF ELECTRODES
）
...................... 15
W
HEN
3-
STAGE ELECTRODE IS USED
（
RIE
MODE
）
.................................................... 16
W
HEN
3-
STAGE ELECTRODE IS USED
（
DP
MODE
）
..................................................... 17
7. RUNNING PROCEDURE .................................................... 18
O
PERATION IN
A
UTO
R
UN
.......................................................................................... 18
R
UNNING
P
ROCEDURE
.............................................................................................. 19
T
OUCH
P
ANEL
O
PERATIONS
...................................................................................... 22
8. PRECAUTIONS FOR HANDLING ...................................... 30
W
ARNING AND
C
AUTION
.................................................................................. 30
9. MAINTENANCE ................................................................... 31
D
AILY
I
NSPECTION
.................................................................................................... 31
P
ERIODIC
I
NSPECTION
............................................................................................... 32
10. ALARMS AND CORRECTIVE ACTIONS .......................... 33
A
LARMS AND
C
ORRECTIVE
A
CTIONS
.......................................................................... 33
O
PERATING
P
ROCEDURES FOR
A
UTO
T
UNING
A
DJUSTING
S
WITCH
............................... 34
11. AFTER-SALE SERVICE AND WARRANTY ...................... 35
R
EQUEST FOR
R
EPAIR
.............................................................................................. 35