10
6. INSTALLING ELECTRODES
Internal structure and of the chamber and parts names
①
Feed through
:
High frequency wave is supplied here.
②
Shelf peg
:
Cable from the vacuum pump is connected here.
③
Shelf board electrode slide
pin
:
This is used when earthing from a source other than the included
power cord or for earthing measuring devices.
④
Upper electrode slide rail
:
Connected to the vacuum pump with the included flexible tube.
①
Feed through 2 points
②
Shelf pegs 4 points
④
Upper electrode slide rail
2 points
③
Shelf board electrode slide pins
8
pins included
Summary of Contents for PDC610
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