Yamato PDC610, Instruction Manual

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33
10. ALARMS AND CORRECTIVE ACTIONS
Alarms and Corrective Actions
Alarm Probable Cause Corrective Action
Reference
page
RF error
The alarm condition, RF
PERMIS-SIBLE LEVEL, is too low. Increase the level.
(Set this based on the default value 10%)
P27
The electrode and the chamber are
shorted by the work, etc. to disable
the set power due to a matching error. Place the work above the chamber so that it
does not contact the chamber.
Plasma is not produced because the
vacuum is too high or low. Supply the process gas to ensure the
vacuum in the chamber is in the range of 100
Pa to 1 Pa.
P28
Ar gas flow
rate error
O
2
gas flow
rate error
The alarm condition, O
2
, Ar
PER-MISSIBLE LEVEL, is too low or
PERMISSIBLE TIME is too short.
Increase the level or time.
(Set this based on the default values 20%
and 30 seconds)
P27
The source valve of the gas is closed
or the gas cylinder is empty. Open the source valve of the gas.
Replace the gas cylinder.
Reflected
wave large
The alarm condition, REFLEX WAVE,
is too small. Increase the value.
(Set this based on the default value 20 W)
P27
The electrode and the chamber are
shorted by the work, etc. to disable
matching. Place the work above the chamber so that it
does not contact the chamber.
Plasma is not produced because the
vacuum is too high or low. Supply the process gas to ensure the
vacuum in the chamber is in the range of 100
Pa to 1 Pa.
P28
Evacuating
time over
Plasma is not produced because the
vacuum is too high or low. Supply the process gas to ensure the
vacuum in the chamber is in the range of 100
Pa to 1 Pa.
P27
The alarm condition, VACUUM TIME,
is too short. Increase the value.
(Set this based on the default value 3 min.)
The evacuating time becomes longer
because of wet work. Dry the work before plasma-cleaning.
Vacuum is leaking because of such
problems as foreign matter caught by
the door, damaged O-ring and loose
piping joint. Conduct the leak test. If leak is detected, take
necessary actions such as replacing the
defective O-ring and re-tightening the loose
piping joint.
Purge time
over
The alarm condition, SUBSTITU-TION
TIME, is too short. Increase the time.
(Set this based on the default value 3 min.)
P27
The source valve of the gas is closed
or the gas cylinder is empty. Open the source valve of the gas.
Replace the gas cylinder.
Vacuum
pump
failure The oil in the vacuum pump has
deteriorated to overload the motor. Replace the oil.
Chamber
temperatur
e high
The chamber temperature has risen
above 90
℃
because of a long time of
plasma radiation.
Stop using the machine until the chamber
cools down. (Even if one process is finished
within the limit time, if operation intervals are
short, the limit value may be exceeded.)
If any problem not listed above has occurred, please contact the dealer or Yamato Scientific.