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14
6. INSTALLING ELECTRODES
When 2-stage electrode is used
(
DP mode
)
①
Connect the feed through and the upper electrode with the upper electrode fixing clamp. (Truss
screws M4×6)
②
Install the DP fixing clamp for shelf board electrode at the point of the shelf board electrode shown in
the diagram below. (Truss screw M4×6)
③
Insert the shelf board electrode into the chamber and connect the feed through and the RIE fixing
clamp for the shelf board electrode. (Truss screws M4×6
)
Installation
position of upper
electrode
fixing
clamp
Upper
electrode
fixing clamp
Summary of Contents for PDC610
Page 40: ...37 13 WIRING DIAGRAM...
Page 41: ...38 13 WIRING DIAGRAM...