13
6. INSTALLING ELECTRODES
When 2-stage electrode is used
(
RIE mode
)
①
Connect the feed through and the lower electrode with the lower electrode fixing clamp.
(
Flat head
screws M4×5, truss screws M4×6
)
②
Install the RIE fixing clamp for shelf board electrode at the point of the shelf board electrode shown in
the diagram below. (Flat head screw M4×5
)
③
Insert the shelf board electrode into the chamber and connect the feed through and the RIE fixing
clamp for the shelf board electrode.
(
Truss screw M4×6
)
Installation position
of lower electrode
fixing clamp
Lower
electrode
fixing clamp
Summary of Contents for PDC610
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