Yamato PDC610, Instruction Manual

Page: 39 / 46

36
12. SPECIFICATIONS
SPECIFICATIONS
Model PDC610
Ma
in
un
it
Power supply 200 - 230 VAC 15A 50/60 Hz (Vacuum pump included)
Internal dimensions of
chamber
(Width) 350 × (depth) 270 × (height) 300 mm
Electrode structure Parallel flat type (Plasma mode: RIE/DP change-over type)
Electrode dimensions (Width) 250 ×(depth) 220 mm three stages
Plasma method
RIE
／
DP change-over type
Vacuum meter Capacitance manometer
Control device Sequencer
Operation/display unit 5 inch STN color LCD touch panel
Hi
gh
-fr
eq
ue
nc
y
po
wer
s
up
p
ly
High-frequency output
power
100
– 600W
Reference oscillator Quartz oscillator
Oscillation frequency 13.56 MHz
Output setting method Manual setting on the touch panel
Matching method Auto tuning
V
ac
uu
m
pump
Model Alcatel T2021
Effective exhaust speed
345 L/min
（
50 Hz
）
Suction port shape NW25
Exhaust port shape NW25
Motor rated output
450 W
（
50 Hz
）
G
as
s
y
s
tem
Purge gas N
2
1/4-inch flare-less joint
Reaction gas
Ar gas Mass flow controller 100 SCCM
1/4-inch flare-less joint
O
2
gas Mass flow controller 100 SC
1/4-inch flare-less joint
Accessory list
No Part name Qty No Part name Qty
1 Main unit(PDC610) 1 18 Lower electrode 1SET
2 Operation manual
（
plain paper
）
1 copy 19 Upper electrode 1SET
3 Operation manual
（
dust-free paper
）
1 copy 20 Shelf board electrode 2SET
4 Operation manual of vacuum pump 1 copy 21 Lower electrode fixing clamp 1
5
Operation manual for capacitance
manometer
1 copy 22 Upper electrode fixing clamp 1
6
Operation manual for vacuum
pump
1 copy 23
Feed through connecting plate
（
used
for 3-stage configuration
）
1
7
Operation manual for mass flow
controller
1 copy 24
Shelf board electrode RIE fixing
clamp
（
used for 2-stage configuration
）
1
8 Warranty card 1 copy 25
Shelf board electrode DP fixing clamp
（
used for 2-stage configuration
）
1
9 Use of high frequency wave 1 copy 26
Shelf board electrode RIE fixing
clamp
（
used for 3-stage configuration
）
2
10 High frequency wave 1 copy 27
Shelf board electrode DP fixing clamp
（
used for 3-stage configuration
）
2
11 High frequency wave 1 copy
28 Truss screw
（
M4×6
）
15
12 Power cord
（
for vacuum pump
）
1 29 Truss screw
（
M4×8
）
5
13 Vacuum pump
（Ｔ
2021SD
）
1 30 Flat head screw
（
M4×5
）
10
14 Oil mist eliminator 1
15 Clamp 3
16 Center ring 3
17 Flexible tube 1