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32
9. MAINTENANCE
Periodic Inspection
Conduct the periodic inspections according to the following tables.
Every Month
Date:
Temperature:
℃
Humidity:
%
Inspected by:
No.
Place
Method
Criteria
Result
Remarks
1
Exhaust speed
test
Conduct
test
under
nor-mal
operating
conditions.
3 minutes max. from
atmospheric pressure to
13 Pa.
If the criteria
are not met
or the oil is
contaminated
, the oil must
be replaced.
2
Ultimate
vacuum test
Conduct
test
under
nor-mal
operating
conditions.
10 Pa or below. after 20
minutes of evacuation.
3
Vacuum
leak
test
Conduct
test
under
nor-mal
operating
conditions.
+20 Pa max. 20 minutes
after
start
from
the
ultimate vacuum.
If over 20 Pa,
vacuum may
be leaking.
Note: If the first test did not meet the criteria, a possible cause may be adsorption of water. If the criteria
are not met, conduct the leak test again immediately after the first test.
Every Year
Date:
Temperature:
℃
Humidity:
%
Inspected by:
No.
Place
Method
Criteria
Result
Remarks
1
Retighten
connection
screws
All motion at a stop.
Not loose.
2
Retighten
piping joints
All motion at a stop.
Not loose.
3
Replace
O-rings
All motion at a stop.
No damage or adhesion
of foreign matter.
4
Earth leakage
breaker
Under
the
normal
operating conditions.
Turned
off
when
the
breake
r’s red button is
pressed.
5
Emergency
stop button
Under
the
normal
operating conditions.
The pump and operation
panel power is turned off.
Every 4 Years
Date:
Temperature:
℃
Humidity:
%
Inspected by:
No.
Place
Installed on
Criteria
Result
Remarks
1
Battery
Programmable controller
Replace
every
4
years.
Programmable terminal
2
Backlight
Touch panel
Correct brightness.
Replace
every 40,000
hours.
◆
The intervals of replacing the oil in the vacuum pump largely depend on the conditions of use, but
usually it must be replaced every three to six months.
◆
The recommended intervals of parts replacement as a result of the inspections are for reference. Parts
may be replaced earlier depending on the frequency of use.
◆
If you have any questions, please contact the dealer or Yamato Scientific.
Summary of Contents for PDC610
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