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VAT 615 DN Series, Installation, Operating, & Maintenance Instructions, Page: 83 / 96

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VAT 615 DN Series Installation, Operating, & Maintenance Instructions Download Page 83

 

Installation, Operating & Maintenance Instructions 

Series 615 DN 40 (I.D. 1.5”), RS485

 

 

 

 

VAT Vakuumventile AG, CH-9469 Haag, Switzerland 

Tel +41 81 771 61 61   Fax +41 81 771 48 30   [email protected]   www.vatvalve.com

 

289111EB

 

2013-02-05 

83/96 

 

Description 

Required tool

 

24. Clean shaft feed through

 

 

Cleanroom wipes soaked 

with isopropyl alcohol 

25. Clean the valve body 

 

Cleanroom wipes soaked 

with isopropyl alcohol 

L

u

b

ri

c

a

te

 a

n

d

 i

n

s

ta

ll s

e

a

ls

 

26. Lubricate seal contact surface of valve 

body with a slight film of 0.0125 ml 
vacuum grease 

 

Vacuum grease 

27. Lubricate seal contact surface of shaft with 

a slight film of 0.0125 ml vacuum grease 

 

 

Vacuum grease 

28. Lubricate each o-ring with a slight film of 

0.0125 ml vacuum grease. 

 

Pay attention:

 If required use new o-rings 

 

Vacuum grease 

Summary of Contents for 615 DN Series

Page 1: ...1 The fabrication number is indicated on each product as per the label below or similar made in Switzerland Fabrication No 615 A Fabrication number Explanation of symbols Read declaration carefully before you start any other action Keep body parts and objects away from the valve opening Attention Hot surfaces do not touch Loaded springs and or air cushions are potential hazards Wear gloves Disconn...

Page 2: ...lms or any other reproduction processes nor may it be manipulated with electronic systems duplicated or distributed without written permission from VAT Offenders are liable to pay damages The original VAT firmware and updated state of the art versions of the VAT firmware are intended for use with VAT products The VAT firmware contains a limited time unlimited user license The VAT firmware may not ...

Page 3: ...1 3 Safety mode 22 3 2 Operation under increased temperature 22 3 3 Behavior during power up 22 3 4 Behavior in case of power failure 22 3 5 Display information 23 3 6 Setup procedure 25 3 6 1 Interface configuration 25 3 6 2 LOGIC I O configuration 27 3 6 3 Valve and sensor configuration 28 3 6 4 ZERO 28 3 6 5 Pressure control configuration 29 3 6 6 Control algorithms 31 3 7 Close valve 35 3 8 Op...

Page 4: ...289111EB 2013 02 05 4 96 5 1 1 Replacement of plate o ring 75 5 1 2 Replacement of shaft feedtrough seals and plate o ring 78 5 2 Option board 87 5 2 1 Durability of power fail battery 87 5 2 2 Retrofit replacement procedure 88 6 Drawing 91 7 Spare parts 92 7 1 Control and actuating unit 92 7 2 Valve unit 93 7 3 Seal kit 93 7 4 Accessories 94 7 4 1 Centering ring with Viton o ring 94 8 Warranty 95...

Page 5: ...ve com www vatvalve com 289111EB 2013 02 05 5 96 1 Use of product This product is a Butterfly control valve with isolation functionality for downstream pressure control in vacuum systems Use product for clean and dry indoor vacuum applications under the conditions indicated in chapter Technical data only Other applications are only allowed with the written permission of VAT ...

Page 6: ... VDC or 70 V peak max 0 5 ADC or 0 5 A peak max 10 W max connector INTERFACE Analog outputs 3 optional 0 10 VDC 1 mA max connector INTERFACE PFO4 battery pack Charging time Durability 2 minutes max up to 10 years 25 C ambient refer to Durability of power fail battery for details Ambient temperature 0 C to 50 C max 35 C recommended Pressure control accuracy 5 mV or 0 1 of setpoint whichever is grea...

Page 7: ...side Control unit for ISO KF version needs support when mounted on horizontal piping and control unit does not hang Wetted Materials Body Stainless steel 316L 1 4404 or 1 4435 Plate Stainless steel 316L 1 4404 or 1 4435 Shaft Stainless steel 316L 1 4404 or 1 4435 Plate screws Stainless steel 316L A4 Plate seal FKM e g Viton Rotary feedthrough seals atmosphere side FKM e g Viton Rotary feedthrough ...

Page 8: ...8 96 2 Installation 2 1 Unpacking Valves DN63 2 and larger must not be lifted solely by the actuator 2 2 Installation into the system Fingers and objects must be kept out of the valve opening and away from moving parts The valve plate may start to move just after power is supplied Do not connect or disconnect sensor cable when device is under power Connection overview Connectors at controller pane...

Page 9: ...at controller Refer to Electrical connection 3 Install sensor s 2 according to the recommendations of the sensor manufacturer and directives given under Requirements to sensor connection 4 Connect pressure sensor cable 3 to sensor s and then to valve connector SENSOR Refer to chapter Electrical connection for correct wiring Note 61532 KEGJ 0002 supports 1 sensor s 5 Connect valve to remote control...

Page 10: ...langes Tightening torques for ISO KF flange connections depends on the type of seal which is used Follow recommendations of seal manufacturer 2 4 Admissible forces Forces from the weight of other components can lead to deformation of the valve body and to malfunction of the valve The stress has to be relieved by suitable means The following forces are admissible Valve size Axial tensile or compres...

Page 11: ...Admissible forces at controller Attention Do not pushing shocking load or stressing the valve controller Do not deposit anything at valve controller The admissible force at valve controller in regards to the pedestal is shown in table below In case higher force is applied the pedestal could be permanently damaged Admissible force F Overview F Force a middle of aluminium part of controller b 2 c pe...

Page 12: ...connected to the chamber by a pipe To maintain that the response time is not degraded by this connection it needs to meet the following requirements Inner diameter of connection pipe 10 mm Length of connection pipe 300 mm These conductance guidelines must include all valves and limiting orifices that may also be present Make also sure that there is no obstruction in front of sensor connection port...

Page 13: ...max B1 min B2 min d1 d2 copper tinned 200 mm 25 mm 25 mm 4 5 mm customized Note Connection plates of ground strap must be total plane for a good electrical contact Note The connection point at chassis FE must be blank metal not coated It is also possible to connect the ground strap at system chamber if it is well connected to PE Note Avoid low chassis cross section to the system PE connection Min ...

Page 14: ...odule SPS that converts 15 VDC from the 24 VDC Concepts External 24 VDC supplied to POWER connector is feed through to SENSOR connector to supply 24 VDC sensors Refer to chapter Power and sensor connection 24 VDC sensors for schematic and correct wiring External 15 VDC supplied to POWER connector is feed through to SENSOR connector to supply 15 VDC sensors Refer to chapter Power and sensor connect...

Page 15: ... 1 Sensor power wiring via controller Note Use shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect the 24 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do not connect other pins that may damage sensor power supply or controller Connector Use only screws with 4 40UNC thread for fastening the connectors Pins 4 and...

Page 16: ...se shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect the 24 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do not connect other pins that may damage sensor power supply or controller Connector Use only screws with 4 40UNC thread for fastening the connectors Pins 4 and 8 must be bridged for operation An optional...

Page 17: ...6 4 1 Sensor power wiring via controller Note Use shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect the 15 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do not connect other pins that may damage sensor power supply or controller Connector Use only screws with 4 40UNC thread for fastening the connectors Pins 4 ...

Page 18: ...se shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect the 15 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do not connect other pins that may damage sensor power supply or controller Connector Use only screws with 4 40UNC thread for fastening the connectors Pins 4 and 8 must be bridged for operation An optional...

Page 19: ...rvice cable and software from VAT You can either use our freeware Control View which can be downloaded from www vatvalve com or purchase our Control Performance Analyzer Alternatively the VAT Service Box 2 can be connected to the service port for setup and local operation The service port is not galvanic isolated Therefore we recommend using this only for setup testing and maintenance and not for ...

Page 20: ...ation Valve opening Fingers and objects must be kept out of the valve opening and away from moving parts Risk of injury Do not connect the controller to power before the valve isn t installed complete into the system 3 1 Introduction This valve is designed for downstream pressure control in vacuum chambers It can be employed in a pressure control mode or a position control mode In both cases local...

Page 21: ...c monitoring basic diagnostic Control Performance Analyzer supports parameter setup manual control sequence control numeric and graphical monitoring data recording data analysis advanced diagnostic When communication to service port is interrupted the valve will change to remote operation So when service cable will be disconnected or software will be shut down the valve returns automatically to re...

Page 22: ...uch valve and heating device during operation Once heating is switched off valve and system await until the valve is cooled down complete before doing any work This valve may be operated in the temperature range mentioned in chapter Technical data 3 3 Behavior during power up Valve position before power up Reaction of valve Valve power up configuration closed default Valve power up configuration o...

Page 23: ...ion Digit 1 Digit 2 Digit 3 Digit 4 At first all dots are illuminated then configuration is displayed Firmware version e g 1E00 1 st information for about 3s Controller configuration 2 nd information for about 3s In case D999 is displayed motor interlock is active Refer to Safety mode for details 1 E 0 0 8 RS485 interface 9 RS485 interface with analog outputs 0 basic 1 with SPS 1 2 with PFO 2 3 wi...

Page 24: ...en by digital input I HOLD position frozen activated H ZERO running Z LEARN running L Safety mode established Refer to Safety mode for details D Power failure F Service request 1 valve requires cleaning S R 1 If SR is blinking alternatively with the actual mode display e g P 11 SR the valve requires cleaning Note RxD TxD activity of RS232 communication is displayed by 2 blinking dots in digit 2 Th...

Page 25: ...oltage Refer to chapter ZERO for details 5 PRESSURE CONTROL COFIGURATION Accommodation of PID controller to the vacuum system characteristic Refer to chapter Pressure Control configuration for details Note Without PRESSURE CONTROL COFIGURATION the valve is not able to run pressure control 3 6 1 Interface configuration Interface configuration must be adapted according to application needs The facto...

Page 26: ...5 2 RS485 Point to Point bbb RS485 address 0 255 c 0 full duplex 1 half duplex xxx 000 reserved do not change Note Each element is separated with square brackets for clarity Square brackets are not part of command syntax All elements are ASCII characters There are no spaces between the elements necessary Command is case sensitive This function defines the RS485 interface configuration for the valv...

Page 27: ...nal and send setup command according to application needs possibility of adjustment see below For Digital input to change the configuration s 2601abcdef CR to read the configuration i 2601 CR Note Each element is separated with square brackets for clarity Square brackets are not part of command syntax All elements are ASCII characters There are no spaces between the elements necessary Command is c...

Page 28: ...nsor 2 Send SENSOR CONFIGURATION 4 Do sensor configuration in menu Setup Sensor 3 6 4 ZERO ZERO allows for the compensation of the sensor offset voltage When ZERO is performed the current value at the sensor input is equated to pressure zero In case of a 2 sensor system both sensor inputs will be adjusted A max offset voltage of 1 4 V can be compensated The offset value can be read via local and r...

Page 29: ... gain factor sensor response time setpoint ramp time p gain i gain and pump down for the PID controller data length 8 characters a Control algorithm 0 adaptive downstream default 1 fixed PI downstream control 2 fixed PI upstream control 3 soft pump Note For adjustment of Control algorithm see table below Note Refer to chapter RS232 Command syntax RS232 commands PID CONTROLLER CONFIGURATION a contr...

Page 30: ...04 0 0032 05 0 0042 06 0 0056 07 0 0075 08 0 010 09 0 013 10 0 018 11 0 024 12 0 032 13 0 042 14 0 056 15 0 075 16 0 10 17 0 13 18 0 18 19 0 24 20 0 32 21 0 42 22 0 56 23 0 75 24 1 0 25 1 3 26 1 8 27 2 4 28 3 2 29 4 2 30 5 6 31 7 5 32 10 33 13 34 18 35 24 36 32 37 42 38 56 39 75 40 100 3 soft pump d Setpoint Ramp Time s default is 0 0 0 0 0 0 1 0 5 2 1 0 3 1 5 4 2 0 5 2 5 6 3 0 7 3 5 8 4 0 9 4 5 A...

Page 31: ...stment To use the adaptive algorithm the valve must undergo the LEARN procedure prior to pressure control operation Refer to chapter 3 6 5 1 Adaptive algorithm Fixed PI algorithm To use the fixed PI algorithm the PI values must be calculated according to the process condition Refer to chapter 3 6 5 2 Fixed PI Soft pump To use the P control algorithm the P values must be calculated according to the...

Page 32: ...ata table can be up downloaded via Control Performance Analyzer software or remote interface Due to encoding the data may not be interpreted directly By an OPEN VALVE CLOSE VALVE POSITION CONTROL or PRESSURE CONTROL command the routine will be interrupted Local operation Control View Control Performance Analyzer or Service Box 2 Remote operation Refer to chapter RS232 control commands resp RS232 s...

Page 33: ...t Pa m 3 s pWP pressure of working point Pa qWP CWP pWP CWP required conductance of working point l s qWP gasflow of working point mbar l s pWP pressure of working point mbar qWP CWP 78 7 pWP CWP required conductance of working point l s qWP gasflow of working point sccm pWP pressure of working point Torr 2 Out of these calculated conductance values choose the lowest CR min CWP1 CWP2 CWPn CR requi...

Page 34: ... when current pressure is higher then setpoint In upstream control mode valve will move towards close when current pressure is higher then setpoint P Gain Step 1 choose the applicable formula depending on units you are familiar with d V pSFS K qmax 1 737 106 d Valve diameter mm V Chamber volume l pSFS Sensor full scale 1 Pa qmax max gasflow to control Pa m 3 s d V pSFS K qmax 1 737 103 d Valve dia...

Page 35: ...ressure is higher then setpoint P Gain Step 1 choose the applicable formula depending on units you are familiar with d V pSFS K qmax 1 737 106 d Valve diameter mm V Chamber volume l pSFS Sensor full scale 1 Pa qmax max gasflow to control Pa m 3 s d V pSFS K qmax 1 737 103 d Valve diameter mm V Chamber volume l pSFS Sensor full scale 1 mbar qmax max gasflow to control mbar l s d V pSFS 1 151 K qmax...

Page 36: ... Tuning of control performance The included PID controller controls the chamber pressure according to the pressure setpoint by means of the valve position The PID controller works with an adaptive algorithm to achieve best results under altering conditions gasflow gas type Local operation Control View Control Performance Analyzer or Service Box 2 Remote operation Refer to chapter RS485 control com...

Page 37: ...performance For some applications tuning may be required to improve performance The tuning procedures for each parameter grey boxes and its default values are described separately below Strictly keep the order of the procedure No No No No No Gain factor adjustment Pressure control ok Sensor delay adjustment Gain factor adjustment Setpoint ramp adjustment Valve speed adjustment Start End Pressure c...

Page 38: ...response lower over undershoot of pressure Adjustment procedure 1 Start with gain factor 1 0 2 Open valve 3 Control a typical pressure flow situation 4 Repeat from step 2 with lower higher gain factors until optimal pressure response is achieved and stability is ok Note Normally adjustments down to gain factors of 0 42 should lead to good results Otherwise you may need to improve sensor connection...

Page 39: ...ill be slowed down by this measure Note Whenever possible sensors should be attached to the chamber according to Requirements to sensor connection This is the most effective measure against stability issues If your gauge attachment fulfills these criteria do not use this parameter Adjustment procedure 1 Start with gain factor 1 0 and sensor delay 0s 2 Open valve 3 Control a typical pressure flow s...

Page 40: ...g on units you are familiar with t Setpoint Ramp Adjustment procedure 1 Start with optimal gain factor and sensor delay time according to preceding tuning steps 2 Control a typical pressure flow situation 3 Control a lower pressure 4 Repeat from step 2 with longer setpoint ramps until best response is achieved 5 Verify pressure control response for a setpoint raise situation Note In case a long ra...

Page 41: ...d Adjustment procedure 1 Use optimal gain factor sensor delay time and setpoint ramp according to preceding tuning steps 2 Open valve 3 Control a typical pressure flow situation 4 Repeat from step 2 with slower valve speed until required response is achieved Local operation Control View Control Performance Analyzer or Service Box 2 Remote operation Refer to chapter RS485 setup commands for details...

Page 42: ...Normally the default settings will result in good pressure control performance For some applications tuning may be required to improve performance The tuning procedures for each parameter grey boxes and its default values are described separately below Strictly keep the order of the procedure No No P Gain to adjustment optimizing Pressure control ok Start End Contact VAT Pressure control ok Set P ...

Page 43: ...to chapter RS485 setup commands for details Go to Tools Terminal menu and send configuration command for adjustment Refer to Pressure controller configuration for command details Send PID CONTROLLER CONFIGURATION 3 11 2 2 I Gain adjustment The I gain effects Stability Response time Adjustment range is from 0 001 to 100 Higher gain results in faster response higher over undershoot of pressure Lower...

Page 44: ...ptimizing P gain and I gain 1 1 Pressure and gas flow for optimization A PI controller delivers the best results for a certain working point pressure gas flow If there is only one working point this pressure and gas flow has to be used for optimizing P and I gain If there are several working points that have to be covered the pressure for optimizing is the medium pressure between highest and lowes...

Page 45: ... P gain set to 1 0 and I gain set to 0 0 Set chamber pressure to SP2 wait until the pressure is stable Set pressure to SP1 If the transition from SP2 to SP1 results in a significant pressure over shoot or even does not stabilize at all the P gain is too high If there is no over shoot and the pressure reaches SP1 asymptotically and very slow P gain is too low The optimal P gain value is found if th...

Page 46: ...in constant Set chamber pressure to SP2 wait until the pressure is stable Set pressure to SP1 If the transition from SP2 to SP1 results in a significant pressure over shoot or if the valve position does not stabilize I gain is to high If the transition results in a slow asymptotical pressure rise and there is still a constant deviation to SP2 the I gain is too low The optimal value for I gain is f...

Page 47: ...rmally the default settings will result in good pressure control performance For some applications tuning may be required to improve performance The tuning procedures for each parameter grey boxes and its default values are described separately below Strictly keep the procedure order No No No P Gain to adjustment Pressure control ok Valve speed adjustment Start End Pressure control ok Contact VAT ...

Page 48: ...y user defined pressure profile usually from atmosphere down to some process pressure 1 Optimizing P gain The P gain value evaluated for soft pump control mode might be different than the P gain value evaluated for PI controller mode When switching to pump down control mode the P gain value evaluated fort he PI controller has to be send to the valve controller When switching back into PI controlle...

Page 49: ... first pressure set point to the valve controller With the example above the first pressure set point is 510 Torr At each new interval exceeding 10 sec send the new pressure set point Repeat until process pressure is achieved While pumping down chamber pressure and valve position should be data logged to compare the actual pump down curve with the ideal straight pump down line If the pressure foll...

Page 50: ...description Send diagnostic file with and all required information to tuning support vat ch 3 12 RS485 interface 3 12 1 Settings The factory default setting of the RS485 interface is shown in the table below It might be changed to fit the application by using the Control View software the Control Performance Analyzer software or the Service Box 2 Baud rate Data bits Stop bits Parity 9600 7 1 none ...

Page 51: ...61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 289111EB 2013 02 05 51 96 Active digital inputs have higher priority than RS485 commands a Configuration with switches for digital inputs Note Do not connect other pins than indicated in the schematics above Connector Use only screws with 4 40UNC thread for fastening the DB 25 connector ...

Page 52: ...Switzerland Tel 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 289111EB 2013 02 05 52 96 b Configuration with voltage source for digital inputs Note Do not connect other pins than indicated in the schematics above Connector Use only screws with 4 40UNC thread for fastening the DB 25 connector ...

Page 53: ... nodes are connected in a multipoint RS485 network A termination resistance is necessary on both ends of the line to eliminate reflections Use 120Ω resistors R on both ends The RS485 network must be designed as one line with multiple drops not as a star 3 12 4 Connection cable drawing Half duplex Full duplex R R T T 120Ω R 11 24 13 12 HOST R 120 Ω R R T T Valve Twisted pair cable Twisted pair cabl...

Page 54: ... RS485 control command have been received The function is activated when optocoupler is on in non inverted configuration The function is activated when optocoupler is off in inverted configuration Configuration can be done in local operation via service port or in remote operation 2 2 23 DIGITAL GROUND Digital ground Ground for all digital inputs Ground is used when digital inputs are operated by ...

Page 55: ...cessary Commands and values are case sensitive Data length of value depends on command Number of characters is specified in the description Some commands do not require the value element CR is Carriage Return 0D hexadecimal LF is Linefeed 3 12 7 Addressed communication Applicable for addressed RS485 communication only In case of RS485 Point to Point setup addressing is not necessary Command 0 1 2 ...

Page 56: ...ading of position SETPOINT Note Reading returns position setpoint only in case pressure control is not selected HOLD Set H CR LF H CR LF This function stops the valve at the current position It is effective in PRESSURE CONTROL and POSITION CONTROL The function can be revoked by a POSITION CONTROL PRESSURE CONTROL OPEN VALVE or CLOSE VALVE command CLOSE VALVE Set C CR LF C CR LF Valve will close OP...

Page 57: ...on 2 POSITION CONTROL 3 CLOSED 4 OPEN 5 PRESSURE CONTROL 6 HOLD 7 LEARN 8 INTERLOCK OPEN by digital input 9 INTERLOCK CLOSED by digital input C power failure D safety mode E fatal error read FATAL ERROR STATUS for details c 0 no warning 1 warning present read WARNINGS and ERROR STATUS for details This function returns an assembly consisting of POSITION PRESSURE and main status information for the ...

Page 58: ... abcdefgh CR LF data length 8 characters a 0 no pressure control e g if position control is selected 1 wide range control PD control 2 close up control PID control cdefgh reserved do not use The controller distinguishes 2 control ranges and acts accordingly DEVICE STATUS Get i 30 CR LF i 30 abcdefgh CR LF data length 8 characters a 0 local operation 1 remote operation 2 locked remote operation b 0...

Page 59: ...t c 0 power failure battery ready 1 power failure battery not ready d 0 compressed air supply ok 1 compressed air supply not ok efgh reserved do not use This function returns warning information about the valve If a warning is present countermeasure should be taken Use RESET command to delete service request bit Note Without LEARN the valve is not able to run pressure control SENSOR OFFSET Get i 6...

Page 60: ...g LEARN gasflow missing g 0 ok 1 sensor unstability during LEARN h reserved do not use This function checks the status of LEARN and indicates if the conditions during LEARN were ok LEARN PRESSURE LIMIT Get i 34 CR LF i 34 0xxxxxxx CR LF data length 8 characters starting with a zero xxxxxxx pressure limit for LEARN return value depends on configuration refer to RS485 setup commands RANGE CONFIGURAT...

Page 61: ...POWER UP COUNTER Get i 72 CR LF i 72 xxxxxxxxxx CR LF data length 10 characters xxxxxxxxxx number of power ups This function returns the number of control unit power ups HARDWARE CONFIGURATION Get i 80 CR LF i 80 abcdefgh CR LF data length 8 characters a 0 Power Failure Option PFO not equipped 1 Power Failure Option PFO equipped b 0 15V sensor power supply SPS not equipped 1 15V sensor power suppl...

Page 62: ... communication to service port is interrupted the valve will automatically change to remote operation INTERFACE CONFIGURATION 1 Set s 20 abcdefgh CR LF s 20 CR LF Get i 20 CR LF i 20 abcdefgh CR LF data length 8 characters a baud rate 0 600 1 1200k 2 2400 3 4800 4 9600 5 19 2k 6 38 4k 7 57 6k 8 115 2k b parity bit 0 even 1 odd 2 mark 3 space 4 no c data length 0 7 bit 1 8 bit d number of stop bits...

Page 63: ...on DIGITAL INPUT LOGIGC I O Set s 2601 abcdef CR s 2601 CR Get i 2601 CR i 2601 abcdef CR data length 6 characters a 0 close valve 1 open valve b 0 non inverted 1 inverted c 0 enabled 1 disabled def 000 reserved This function does the DIGITAL INPUT configuration DIGITAL OUTPUT LOGIGC I O Set s 2611 abcdef CR s 2611 CR Get i 2611 CR i 2611 abcdef CR data length 6 characters a 0 close 1 open b 0 non...

Page 64: ...FIGURATION Set s 01 abcdefgh CR LF s 01 CR LF Get i 01 CR LF i 01 abcdefgh CR LF data length 8 characters a 0 no sensor 1 1 sensor operation sensor 1 input 2 2 sensor operation with automatic changeover low range sensor 2 input high range sensor 1 input 3 1 sensor operation sensor 2 input 4 2 sensor operation with automatic changeover low range sensor 1 input high range sensor 2 input Note Sensor ...

Page 65: ...ge between the valve and the host computer for POSITION PRESSURE and SENSOR READING Note In case ZERO has been performed gauge offset for PRESSURE and SENSOR READING is compensated Note In case 2 sensor operation for pressure control is selected PRESSURE covers high range gauge because switchover between sensors is done automatically SENSOR 1 READING and SENSOR 2 READING always return full scale v...

Page 66: ...tarting with a zero xxxxxxx Pressure limit for LEARN value depends on configuration refer to RS485 setup commands RANGE CONFIGURATION for details This command starts LEARN By OPEN VALVE CLOSE VALVE or POSITION CONTROL commands the routine may be interrupted Note Without LEARN the PID controller is not able to perform pressure control Refer to LEARN for correct learn gas flow and procedure DOWNLOAD...

Page 67: ...Ramp Time s 0 0 0 1 0 5 2 1 0 3 1 5 4 2 0 5 2 5 6 3 0 7 3 5 8 4 0 9 4 5 A 5 0 B 5 5 C 6 0 D 6 5 E 7 0 F 7 5 G 8 0 H 8 5 I 9 0 J 9 5 K 10 0 ef P Gain 00 0 0010 01 0 0013 02 0 0018 03 0 0024 04 0 0032 05 0 0042 06 0 0056 07 0 0075 08 0 010 09 0 013 10 0 018 11 0 024 12 0 032 13 0 042 14 0 056 15 0 075 16 0 10 17 0 13 18 0 18 19 0 24 20 0 32 21 0 42 22 0 56 23 0 75 24 1 0 25 1 3 26 1 8 27 2 4 28 3 2 ...

Page 68: ...for writing 8 characters starting with quadruple zero for reading xxxx valve speed 1 1000 1 min speed 1000 max speed This command allows changing the actuating speed of the valve plate Speed selection is effective for pressure control and position control Open valve and close valve are always done with max speed Note Refer to Valve speed adjustment for details RESET Set c 82 xx CR LF c 82 CR LF da...

Page 69: ...rflow to many characters E 000002 CR LF Commands CR or LF missing E 000010 CR LF missing E 000011 CR LF Unknown command E 000020 CR LF E 000021 CR LF Invalid value E 000022 CR LF E 000023 CR LF Value out of range E 000030 CR LF Invalid number of characters between and CR LF E 000012 CR LF Setup ZERO disabled E 000060 CR LF Device Status Command not accepted due to local operation E 000080 CR LF Co...

Page 70: ...E 21 and position is 009999 fatal error rotation angle of valve plate limited during power up Valve plate centric adjusted Valve unit heavy contaminated Valve plate mechanically obstructed Adjust valve plate according to Maintenance procedure Clean valve unit according to Maintenance procedure Resolve obstruction Reset control unit Cycle power OFFàON or Send reset command local via service port wi...

Page 71: ...ls Refer to Display shows M100 in this table Display shows M C Maintenance mode active Pin 14 of service connector is connected to ground Plate will close Further movement of plate is blocked Note Priority of pin 14 is higher than pin 13 If pin 14 is connected to ground after pin 13 the valve will close Ground of service connector is at pin 4 and 8 Display shows M100 Maintenance mode active Pin 13...

Page 72: ... details Select PRESSURE CONTROL mode Refer to Pressure control for details Perform LEARN Refer to Setup procedure for details PRESSURE CONTROL not optimal Setup done completely LEARN done ZERO performed before LEARN LEARN interrupted Was gas flow stable during LEARN Tuning done Is sensor range suited for application Noise on sensor signal Perform Setup procedure completely Perform LEARN Refer to ...

Page 73: ...wer must be disconnected for removal installation of the valve from into the system Even with disconnected supply loaded springs and or air cushions in cylinders can be potential hazards Keep fingers and objects away from the valve opening Products returned to VAT must be free of harmful substances such as e g toxical caustic or micro biological ones If products are radioactively contaminated fill...

Page 74: ...grease being limited under increased temperature In this case grease will separate to PTFE and oil The oil may flow and contaminate the valve parts VAT can give the following recommendations for preventive maintenance with FKM seals under clean and unheated condition Seals Maintenance recommendation Plate o ring Exchange after 250 000 isolation cycles or 2 000 000 control cycles Shaft feedthrough ...

Page 75: ...system on both sides of the valve 2 Move the plate to position 50 open 3 Disconnect electrical POWER connector at valve and remove valve from vacuum system Pay attention Electrical power is needed for plate adjustment in step 19 Take care to the sealing surface Remove the plate 4 Unfasten and remove the 2 fastening screws Allen Wrench 3mm 5 Push the plate a little down 6 Remove the plate on the ot...

Page 76: ...ion Required tool Replace o rings at plate 9 Clean the plate and o ring groove Cleanroom wipes soaked with isopropyl alcohol 10 Lubricate the new o ring with 0 0125 ml vacuum grease For new o ring refer to chapter spare parts Vacuum grease 11 Pay attention that grease is distributed constantly over the whole circumference 12 Place the new o ring at o ring groove at one side 13 Move the o ring in t...

Page 77: ...ing Assemble and adjust plate 16 Place the plate on the shaft in the valve body Assemble and adjust plate 17 Tighten plate screws to block 18 Loosen the plate screws a quarter turn counter clockwise Fact Plate is now movable on shaft and ready to sliding into valve seat Proceed with step 19 Allen Wrench 3mm 19 Connect electrical POWER connection at valve Attention Valve does synchronize automatica...

Page 78: ...s Allen torque wrench 3mm Cleanroom wipes Install valve into system 23 Reinstall valve into vacuum system according to chapter Installation of valve manual 5 1 2 Replacement of shaft feedtrough seals and plate o ring Description Required tool Preparation 1 Vent vacuum system on both sides of the valve 2 Move the plate to position 50 open 3 Disconnect electrical POWER connector at valve and remove ...

Page 79: ...vatvalve com www vatvalve com 289111EB 2013 02 05 79 96 Description Required tool 5 Unfasten and remove the 3 fastening screws Allen Wrench 3mm 6 Remove control and actuating unit from mechanical valve unit Pay attention If clamp coupling is separated assemble them at control and actuating unit Remove plate 7 Unfasten and remove the 2 fastening screws Allen Wrench 3mm ...

Page 80: ...3 02 05 80 96 Description Required tool 8 Push the plate a little down 9 Remove the plate on the other side of shaft Replace o rings from plate 10 Remove the plate o ring 11 Replace the plate if necessary Soft tool 12 Clean the plate and o ring groove Cleanroom wipes soaked with isopropyl alcohol 13 Lubricate the new o ring with 0 0125 ml vacuum grease For new o ring refer to chapter spare parts V...

Page 81: ...B 2013 02 05 81 96 Description Required tool 14 Pay attention that grease is distributed constantly over the whole circumference 15 Place the new o ring at o ring groove at one side 16 Move the o ring in the o ring groove on the other side Replace o rings from plate 17 Push in the o ring around the plate into o ring groove equally 18 Plate with equal mounted o ring 19 Deposit the plate on a clean ...

Page 82: ...41 81 771 48 30 CH vatvalve com www vatvalve com 289111EB 2013 02 05 82 96 Description Required tool Seal removal and valve cleaning 20 Unfasten both screws complete Allen Wrench 3mm 21 Remove mechanical unit from valve body 22 Clean shaft Cleanroom wipes soaked with isopropyl alcohol Seal removal and valve cleaning 23 Remove both o rings Soft tool ...

Page 83: ...leanroom wipes soaked with isopropyl alcohol 25 Clean the valve body Cleanroom wipes soaked with isopropyl alcohol Lubricate and install seals 26 Lubricate seal contact surface of valve body with a slight film of 0 0125 ml vacuum grease Vacuum grease 27 Lubricate seal contact surface of shaft with a slight film of 0 0125 ml vacuum grease Vacuum grease 28 Lubricate each o ring with a slight film of...

Page 84: ...iption Required tool 29 Slide both o rings onto shaft till the end 30 Deposit 0 05 ml vacuum grease between the o rings 31 Clean shaft from vacuum grease Vacuum grease Cleanroom wipes Mount mechanical unit to valve body 32 Install mechanical unit into valve body see picture 33 Fasten and tighten the 2 mounting screws with 2 5 Nm Allen torque wrench 3mm Assemble and adjust plate 34 Place the plate ...

Page 85: ...ews a quarter turn counter clockwise so that plate is still movable at shaft Allen Wrench 3mm 37 Press the plate A into valve seat 38 lever Press the B by hand to axis C Make sure that lever B is engaged at axis C completely mechanical close position 39 Fasten the plate screws with 2 5 Nm 40 If some grease on plate surface or valve body clean it with lint and dust free cloth Allen torque wrench 3m...

Page 86: ... 48 30 CH vatvalve com www vatvalve com 289111EB 2013 02 05 86 96 Description Required tool Mount control and actuating unit to valve unit 42 Tighten mounting screws adequately Allen Wrench 3mm 43 Tighten clamp coupling screw with 1 1 Nm Allen torque wrench 2mm Install valve into system 44 Reinstall valve into vacuum system according to chapter Installation ...

Page 87: ... PFO function the option board must be replaced after battery life has expired For ordering number of the modules refer to Spare parts and accessories 5 2 1 Durability of power fail battery The curves in the graph show the estimated life of UltraCap PFO in the worst condition max sensor load 1 A valve heating temperature 150 degree C If the SPS is not fully loaded 1 A or heating temperature of val...

Page 88: ...n All work on the control and actuating unit has to be done under ESD protected environment to prevent electronic components from damage Top view on control and actuating unit with panel removed Note All boards have a fixed position into control and actuating unit It is not possible to fit a board in other position as shown in picture above Do not try out other positions that may be destroy the so...

Page 89: ...41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 289111EB 2013 02 05 89 96 Description Required tool 1 Remove the panel screws Pozidriv screw driver size 1 2 Remove female screw locks from POWER SENSOR and INTERFACE connectors Open end wrench 4 5 mm 3 Lift the panel carefully 4 Disconnect fan cable from board ...

Page 90: ...ard 6 Remove or replace interface board 7 Remove or replace option board 8 Insert master board and interface board in reverse order as disassembled at correct positions see steps 6 5 9 Insert option board at correct position see step 7 10 Reconnect fan cable see step 4 11 Place the panel and tighten screws with 1 1 Nm see steps 3 2 Pozidriv screw driver size 1 12 Tighten female screw locks from PO...

Page 91: ...CH 9469 Haag Switzerland Tel 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 289111EB 2013 02 05 91 96 6 Drawing 1 2 3 4 5 6 7 8 1 Body with mechanism 5 Plate screws 2 Lever complete 6 Body complete 3 Adapter flange rod with bearing 7 Plate 4 Rotary feedtrough seals 8 Plate o ring ...

Page 92: ...cify the fabrication number of the valve see yellow label on valve when ordering spare parts This is to ensure that the appropriate spare parts are supplied 7 1 Control and actuating unit Item Description Valve size Product ordering number All sizes 615 Control and actuating unit 494512 Option board with SPS module 15VDC sensor power supply 378000 Option board with PFO module power failure option ...

Page 93: ...mplete 462153 2 Spare parts kit lever complete 429341 3 Spare parts kit adapter flange rod with bearing 453094 levercompl 429341 5 Plate screws 428946 6 Body complete 443048 7 Plate 428257 For versions such as Other valve sizes or heated valves spare part ordering numbers are available on request 7 3 Seal kit Item Description 4 Rotary feed through seals kit 237235 Rotary feed through seals atmosph...

Page 94: ...ee download from www vatvalve com or available on order against charge Service cable PC to valve connection 230327 free wiring information available for download from www vatvalve com Connector kit consisting of DB 9 female POWER plug DB 15 male SENSOR plug DB 25 male INTERFACE plug 242411 Service Box 2 601BS 29NN 000 Control panel rack mount version of Service Box 2 602BS 29LE 000 Special Allen w...

Page 95: ... expense whether consequential special incidental direct or otherwise caused by arising out of or connected with the manufacture delivery including any delay in or failure to deliver packaging storage or use of any product sold or delivered by VAT shall fail to conform to the foregoing warranty or to the description thereof contained herein the purchaser thereof as its exclusive remedy shall upon ...

Page 96: ...enance Instructions Series 615 DN 40 I D 1 5 RS485 VAT Vakuumventile AG CH 9469 Haag Switzerland Tel 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 289111EB 2013 02 05 96 96 This Page Intentionally Left Blank ...

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