Installation, Operating & Maintenance Instructions
Series 615 DN 40 (I.D. 1.5”), RS485
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 [email protected] www.vatvalve.com
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2013-02-05
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3.9 Position control
The valve position is directly controlled according to the position setpoint.
Local operation
:
(„Control View‟, „Control Performance Analyzer‟ or
„Service Box 2„)
Remote operation
:
(Refer to chapter «RS485 control commands» for
details)
Select or enter position setpoint
Send POSITION CONTROL
3.10 Pressure control
To
prepare
valve
for PRESSURE CONTROL
perform complete
«Setup procedure»
.
The valve has parameters that may be modified to tune
pressure control performance
.
Refer to
«Tuning of control performance»
.
The included PID controller controls the chamber pressure according to the pressure setpoint by means of the valve
position. The PID controller works with an adaptive algorithm to achieve best results under altering conditions (gasflow,
gas type).
Local operation
:
(„Control View‟, „Control Performance Analyzer‟ or
„Service Box 2„)
Remote operation
:
(Refer to chapter «RS485 control commands» for
details)
Select or enter pressure setpoint
Send PRESSURE CONTROL
3.11 Tuning of pressure control performance
Tuning of pressure control performance with adaptive control, refer to chapter: 3.11.1 Tuning of pressure control
(adaptive)
Tuning of pressure control performance with fixed PI control, refer to chapter: 3.11.2 Tuning of pressure control
performance with fixed PI control
Tuning of pressure control performance with soft pump control, refer to chapter: 3.11.3 Tuning of pressure
control (soft pump)