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2. Evacuation Device Operation Procedure
2-1 Preparation
1) VENT. V, three-way valve, main valve:
CLOSE
2) All switches on the operation panel:
OFF
3) Attach the probe to the gauge port when using the ionization
gauge.
4) User side breaker:
ON
2-2 Operations
Unit setup
1) MAIN.SW:
ON
2) BACK. P:
ON
MAIN. PUMP cooling fan:
ROTATE
3) Three-way valve: FORE
4) After 1-min evacuation, MAIN. P:
ON
5) D.P warming up in 15 mins:
COMPLETE
Vacuum evacuation start
1) It is exhausting chamber connection to a main valve flange.
CHECK
2) VENT. V (main valve):
CLOSE
3) Three-way valve: ROUGH
13pa or less CHECK
4) Three-way valve: FORE
5) Main valve:
COMPLETE CLOSE
6) When an ionization gauge is use. Filament:
ON
2-3 Stop
Vacuum evacuation stop
1) When an ionization gauge is use. Filament: OFF
2) Main valve:
COMPLETE CLOSE
3) VENT. V (main valve): It opens gradually
Unit shutdown
1) Vacuum evacuation for maintaining vacuum condition inside the
chamber.
2) When an ionization gauge is use. Filament:
OFF
3) Main valve:
COMPLETE CLOSE
4) MAIN. P:
OFF
5) Cooling MAIN. PUMP for 30 mins.
6) Three-way valve:
CLOSE
7) VENT. V (of roughing piping):
OPEN
8) BACK. P:
OFF
MAIN. PUMP cooling fan:
STOP
9) MAIN.SW:
OFF
10) Breaker of user side:
OFF
