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(1) Before Using 

1. Target Users 

Only persons who have used vacuum deposition equipment or trained based on this 
manual may operate this equipment. 

2. Read the Manual Thoroughly 

Please read this manual thoroughly in order to use the equipment in a safe and correct 
manner. 
Please pay particular attention when reading the section “To Safely Use This Equipment”. 

3. Keep This Manual in a Safe Place 

Keep this manual in a safe place. 
After reading this manual, be sure to keep it in a safe place where it is readily accessible 
to other users. 

4. Warranty 

(1) The warranty for this pump (this equipment) extends for a period of one year from the 

date of shipment. 

(2) Any malfunctions or defects which occur under normal usage conditions during the 

warranty period will be repaired free of charge. 

Note, the warranty stated here is an individual warranty covering the pump. In addition, 
the scope of the warranty coverage concerning repairs is limited to the repair and/or 
replacement of parts. 
Normal usage conditions refer to the following: 

a) Ambient temperature and humidity during operation: 7 - 30°C, below 85% RH 
b) Operation in accordance with the user manual 

(3) Repair fees will incur during the warranty period for the following cases: 

a) Malfunctions due to a natural disaster or fire. 
b) Malfunctions caused by special atmospheric conditions, such as salt damage, 

inflammable gas, corrosive gas, radiation or pollution. 

c) Malfunctions caused by usage conditions that differ from those stated in the user 

manual (performance specifications, maintenance and inspection, etc.). 

d) Malfunctions caused by modifications or repairs carried out by a party other than 

the manufacturer, or by a service company not approved by the manufacturer. 

e) Malfunctions caused by noise (electric disturbance). 
f) Malfunctions that occur when not using a rated power supply. 
g) Malfunctions that occur when there is an abnormal rise in internal pressure due to 

the pump exhaust outlet being blocked during operation, etc. 

h) Malfunctions that occur, when the pump is damaged as a result of being dropped 

or falling, etc. 

i) Malfunctions which are determined by the manufacturer’s technical personnel to be 

caused by conditions that do not comply with the usage conditions for this vacuum 
pump. 

j) Malfunctions due to the replacement of consumables.         

(4) Disclaimer 

a) We shall not be liable for any malfunctions of our products caused by the customer, 

regardless if the malfunction does not fall within the warranty period, nor shall we 
be liable for any loss of opportunity for the customer’s clients or for compensation 
for any damages to other products, labor costs, production loss, transportation 
expenses and other related work.   

b) We shall not be liable for any claims and patent infringements, including secondary 

damages, filed a claim by a third party against the customer. 

 

5. Statutory Requirements for Disposal 

Follow all statutory and local authority regulations when disposing of this equipment 
including used oil. 
Comply with regulations upon disposal. For details on disposal, contact us. 

6. Safety during Repair 

When requesting repairs to this product, provide a full description of the conditions of use 
(particularly any use of dangerous materials) for the safety of repair personnel. 
In this case, fill in the Use Condition Check Sheet and attach to the product. 
If the use conditions are unknown, repair may be refused. 

Summary of Contents for VPC-051

Page 1: ...l thoroughly to ensure safe and effective operation of this equipment Keep this manual in a safe place Please note that due to performance upgrade the equipment described in this manual is subject to...

Page 2: ...vidual Unit Specifications 3 5 Standard Accessories 4 6 How to Use Switches Handles and Operation Levers 4 7 Layout of Switches Handles and Operation Levers 5 Evacuation system drawing Electrical syst...

Page 3: ...3 Removal Maintenance and Installation of Devices 12 3 1 Oil sealed rotary vacuum pump 12 3 2 Oil diffusion pump 12 3 3 Oil mist trap 13 4 Maintenance and Inspection Points 13 5 Troubleshooting 14 6 S...

Page 4: ...duced without permission of Ulvac Kiko Inc Read this section before using the VPC 051 Always follow the instructions below to safely use the device and prevent personal injuries from occurring The sym...

Page 5: ...rical shock in case of failure or current leakage Check the cable capacity Avoid using an extension cable However if it must be used by necessity use the following cable For 100 V power supply 1 25 mm...

Page 6: ...tion outlet of the oil sealed rotary vacuum pump during roughing operation Use an oil mist trap sold separately Otherwise oil spread may contaminate the room or affect human health Ventilate Pump is h...

Page 7: ...gen splashes and adheres to your skin you may feel acute pain momentary Confirm complete close After confirming complete closure of the main valve let out the air in the bell jar If air comes into the...

Page 8: ...than the above contact us Replace periodically Oil mist trap sold separately should be replaced every six months to one year Clogging in the element increases evacuation resistance which may cause oi...

Page 9: ...cations or repairs carried out by a party other than the manufacturer or by a service company not approved by the manufacturer e Malfunctions caused by noise electric disturbance f Malfunctions that o...

Page 10: ...is vacuum pump unit as a vacuum vessel Reselling repairing and refurbishing of the product that are not permitted by us Avoid this action 2 Safety Device and its Purpose and Functions Item Purpose Fun...

Page 11: ...320 mm Height 461 mm Approx 20 kg Finished color Rack Panel baking finish Munsell 6Y 8 0 8 baking finish Munsell 6Y 8 0 8 4 Individual Unit Specifications Unit Model and Specifications Quantity 1 Oil...

Page 12: ...d Operation Levers Confirm Before handling switches handles or operation levers confirm the safety and conditions Name How to Operate MAIN switch Manual ON OFF BACK P switch Manual ON OFF ON lamp illu...

Page 13: ...5 7 Layout of Switches Handles and Operation Levers Evacuation system drawing 1 100V 0 63kVA Electrical system drawing...

Page 14: ...here the following conditions are satisfied 1 Flat surface 2 Floor with sufficient strength 3 Well ventilated place 4 Place without direct sunlight 5 Room with temperatures between 7 C and 30 C 6 Loca...

Page 15: ...g wire Employ Level D grounding The grounding wire is the green wire Use a plug with grounding wire for 100 V power supply If you use a plug adapter connect the grounding wire with a nearest grounding...

Page 16: ...es When using liquid nitrogen wear gloves to protect your hands If liquid nitrogen splashes and adheres to your skin you may feel acute pain momentary Confirm complete close After confirming complete...

Page 17: ...in valve flange CHECK 2 VENT V main valve CLOSE 3 Three way valve ROUGH 13pa or less CHECK 4 Three way valve FORE 5 Main valve COMPLETE CLOSE 6 When an ionization gauge is use Filament ON 2 3 Stop Vac...

Page 18: ...ressure for about 30 minutes This is not a failure Close the MAIN valve to prevent inside of the bell jar from contamination 3 Measures upon Abnormal Conditions 3 1 Instantaneous power outage All devi...

Page 19: ...tion resistance which may cause oil leakage from the axis sealing area or oil level gauge damage Work by two or more people Installation and removal of the oil diffusion pump and oil sealed rotary vac...

Page 20: ...oval procedure All devices of the coater stop Confirm The primary power supply of the coater is removed Confirm VENT V of roughing piping is open Confirm Three way valve FORE Leave the inside of the D...

Page 21: ...nce and Inspection Points Unit Maintenance and Inspection Timing of Maintenance and Inspection Oil sealed rotary vacuum pump Confirm that the oil level of the oil level gauge is within the indicated l...

Page 22: ...ect air intake leakage etc replace the oil Failure in the oil sealed vacuum pump Refer to the Oil Sealed Vacuum Pump User s Manual Failure in measuring instrument Replace the measuring instrument The...

Page 23: ...OK O ring for leakage valve N 8 NBR 1 OK Oil diffusion pump Gasket for suction flange 57 48 t5 NBR 1 OK Oil for use SY 0 02L OK Mica heater Single phase 100 V 0 25 kW 1 NG Vacuum hose for MAIN P 12 30...

Page 24: ...this action Do not use other manufacturer s optional parts for modification We do not assume any responsibility for any damage due to such modifications 1 Standard Optional Parts List Name of optional...

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