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3. Removal, Maintenance, and Installation of Devices
3-1 Oil sealed rotary vacuum pump
1) Required tool: 8 mm Spanner x 1
2) Removal procedure
- All devices of the coater stop.:
Confirm
- The primary power supply of the coater is removed.:
Confirm
- Remove the roughing piping by loosening the roughing piping fixing
nut.
- Remove the vacuum hose.
- Remove the Mate N Lock for the motor wiring.
- Remove the vibration-control rubber nuts (4 points).
- Remove the pump unit by lifting the motor portion and front cover.
3) Oil replacement
Refer to the separate sheet – Oil Sealed Rotation Vacuum Pump User’s
Manual
4) Order of attachment
- Attach the motor portion and front cover by lifting them.
- Attach the nuts for vibration control (4 points)
- Attach the Mate N Lock for the motor wiring.
- Attach the vacuum hose and insert the roughing piping.
- Attach the roughing piping fixing nut.
3-2 Oil diffusion pump
1) Required tool: 13mm Spanner x 1
2) Removal procedure
- All devices of the coater stop.:
Confirm
- The primary power supply of the coater is removed.: Confirm
- VENT. V (of roughing piping) is open.:
Confirm
- Three-way valve: FORE (Leave the inside of the DP open air)
- Remove the Mate N Lock for the heater and the cooling fan wirings.
- Remove the tightening nut from the suction opening flange, and draw
out the vacuum hose attached to the exhaust outlet.
(Remove the nut while holding the oil diffusion pump.)
- Draw the oil diffusion pump forward and remove it.
3) Oil replacement
Refer to the separate sheet – DPF-050 Oil Diffusion Pump User’s
Manual
4) Order of attachment
- Position the oil diffusion pump with its pump suction opening faced to
the front of the roughing piping and below the liquid nitrogen trap.
- Lift the oil diffusion pump, insert the vacuum hose to the roughing
piping and tighten the M8 nuts (2 locations) by three or four ridges.
Then tighten the other two locations left.
- Tighten the fixing nuts evenly (orthogonally).
- Attach the Mate N Lock for the heater and the cooling fan wirings.
- Insert the roughing piping to the exhaust outlet of the oil diffusion
pump.
