15
7. Consumable List
Location
of Use
Parts
Specifications
Material
Quantity
Replacement
by user
Rack
Rubber Foot
KP-5 --- 4
OK
Warning Label
PL004 --- 1
OK
Warning Label
PL007 --- 1
OK
Warning Label
PL008 --- 1
OK
Main
valve
O-ring for suction
flange
V-40
NBR
1
OK
O-ring for exhaust
flange
P-12
NBR
1
OK
O-ring for axis
N-7
NBR
1
NG
Rubber lining for
valve seat
---
NBR
1
NG
O-ring for gauge
port
N-16
NBR
1
OK
O-ring for leakage
valve
N-8
NBR
1
OK
Oil
diffusion
pump
Gasket for suction
flange
φ
57×
φ
48×t5
NBR
1
OK
Oil for use
SY
---
0.02L
OK
Mica heater
Single-phase
100 V, 0.25
kW
---
1
NG
Vacuum hose for
MAIN.P
φ
12
×
φ
30
L=70
Special
rubber
1
OK
Oil
sealed
rotary
vacuum
pump
Oil
SMR-100
---
0.18L
OK
Vibration-control
rubber
ME-15
---
4
OK
Vacuum hose for
BACK.P
φ
15
×
φ
36
L=165
Special
rubber
1
OK
Three-way
valve
O-ring for leakage
valve
N-8
NBR
1
OK
O-ring for gauge
port
N-16
NBR
1
OK
O-ring for Piping
roughing
P-12
NBR
2
OK
Packing set for
re-grease
---
---
1
NG
Specifications and quantity is different for special models.
