2
(2) Product Overview
1. Purpose of This Product and Actions that are Prohibited
This product is a system that evaporates substances in a vacuum space by means
of resistance heating evaporation source to form a thin film.
To safely and correctly use this product, avoid the following actions that are
prohibited.
Using this vacuum pump unit as a vacuum vessel.
Reselling, repairing, and refurbishing of the product that are not
permitted by us.
Avoid this action
2. Safety Device and its Purpose and Functions
Item Purpose
Functions
How to
Check
Overload
Short-circuit
Protection for the
oil-sealed rotary
vacuum pump, oil
diffusion pump
and short-circuit
Earth leakage breaker located in
vapor deposition unit main breaker.
Manual reset after troubleshooting
N/A
Operation with the safety devices above disabled
is prohibited.
Avoid this
action
