Ulvac C10T, Instruction Manual

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ULVAC CRYOGENICS INCORPORATED R-1
Revision History
Date Revision No. Contents
2001-02-26
2007-03-20
2007-08-08
2011-02-14
2011-05-16
2011-12-01
2013-03-26
2014-04-03
2016-11-21
2019-11-15
2001.02
2007MH01
2007AT02
2011FY03
2011MY04
2011DR05
2013MH06
2014AL07
2016NR08
2019NR09
First edition
Correction of the type of cold head cable connector.
Deletion of the descriptions related to adsorber replacement.
Cover: Export control policy has been revised.
Full-fledged revision.
P.B-3
～
6 C10T Compressor unit circuit diagram and wiring
diagram have been revised.
Service Network has been revised.
“Safety Instruction” No.3 and No.5 have been revised.
“SERVICE NETWORK” has been revised.
“Introduction” and “SERVICE NETWORK” have been
revised.
“Safety Instructions” and “Maintenance” have been revised.
Appendix B Figure B-1 Circuit Diagram has been modified.
SERVICE NETWORK has been revised.