Ulvac C10T, Instruction Manual

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ULVAC CRYOGENICS INCORPORATED S-1
Compressor Unit Safety Instructions
Read this manual and follow these safety guidelines before installing, operating, or
servicing the compressor unit.
Our Cryo-U
®
cryopump and Super trap refrigerator systems make a refrigeration cycle by
circulating high pressure helium gas. Filling helium gas more than the defined amount
does not improve refrigeration capacity appreciably. Instead, if excessive helium gas is
filled and pressure becomes higher than the defined value, gas will release from the safety
valve and its sheet may become clogged with dirt. This may even cause a leak as well as
overloading of the compressor motor.
Do not fill the helium gas more than the defined amount.
When charging helium gas or performing helium line decontamination, refer to the
“Maintenance” section and follow the instruction.
Use regulators, charging hoses, or adopters that can be used at the pressure of 2.0MPaG
or higher when performing the above work.
Do not start/stop the operation frequently.
The number of times that compressor motor can be started / stopped is 6 times or less per
hour and each status should be kept for at least 3 minutes. Frequent starting/stopping
shortens the insulation life of the compressor motor and may cause a failure of the product.
Do not start/ stop operation to control the temperature of Super Trap.
Please contact us when it is required to control the temperature of super trap.
３．
Do not switch between ON and OFF frequently
１
. Do not overfill helium gas
２．
Adding helium gas and charging equipments