Compressor Unit Description
1-2
ULVAC CRYOGENICS INCORPORATED
◆
Helium Gas Pressure: (Room temperature : 20°C)
Charge Pressure(*2)
1.73
±
0.04 MPaG
Operating Pressure(SUPPLY) (*3)
1.8
~
2.0 MPaG
(*2) The charge pressure in the above table is the value when flexible hoses with 20m at
largest. If the hose is larger than 20m, the charge pressure will be different. Contact us
for the detail.
When you use a flexible hose with length of 10m to 20m, chose the hose dedicated
to C10. If a standard hose of the same length is used, helium charge pressure will
be lower than required, inviting the need for charging helium gas.
CAUTION
(*3) Operating pressure is expected when a flexible hose of 3m are used. The operating
pressure will be larger by 10% with a hose of 20m.
◆
Applicable Model of Cryopump and Refrigerator unit
Cryopump U8HT
Refrigerator
R10RT / RM10T
◆
Connector Specifications (Cable Side)
CONNECTOR MANUFACTURER
TYPE
INPUT POWER
NANABOSHI
NCS-304-P
COLD HEAD POWER
NANABOSHI
NJC-204-PM
REMOTE/RESPONSE JAE
SRCN6A25-16P
※
The Cold Head Power Cable is dedicated to three-phase motor refrigerator unit.
Summary of Contents for C10T
Page 2: ......
Page 8: ...F 6 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank ...
Page 14: ...S 4 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank ...
Page 16: ...IW 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank ...
Page 32: ...Operation 4 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank ...
Page 44: ...Troubleshooting A 4 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank ...
Page 47: ...Compressor Unit Instruction Manual ULVAC CRYOGENICS INCORPORATED B 3 B 4 ...
Page 48: ...Compressor Unit Instruction Manual ULVAC CRYOGENICS INCORPORATED B 5 B 6 ...
Page 50: ...Flexible Hose C 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank ...
Page 54: ...CS 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank ...
Page 56: ...This page intentionally left blank R 2 ULVAC CRYOGENICS INCORPORATED ...