Ulvac C10T, Instruction Manual

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Compressor Unit Description
1-2
ULVAC CRYOGENICS INCORPORATED
◆
Helium Gas Pressure: (Room temperature : 20°C)
Charge Pressure(*2) 1.73 ± 0.04 MPaG
Operating Pressure(SUPPLY) (*3) 1.8
～
2.0 MPaG
(*2) The charge pressure in the above table is the value when flexible hoses with 20m at
largest. If the hose is larger than 20m, the charge pressure will be different. Contact us
for the detail.
When you use a flexible hose with length of 10m to 20m, chose the hose dedicated
to C10. If a standard hose of the same length is used, helium charge pressure will
be lower than required, inviting the need for charging helium gas.
CAUTION
(*3) Operating pressure is expected when a flexible hose of 3m are used. The operating
pressure will be larger by 10% with a hose of 20m.
◆
Applicable Model of Cryopump and Refrigerator unit
Cryopump U8HT
Refrigerator R10RT / RM10T
◆ Connector Specifications (Cable Side)
CONNECTOR MANUFACTURER TYPE
INPUT POWER NANABOSHI NCS-304-P
COLD HEAD POWER NANABOSHI NJC-204-PM
REMOTE/RESPONSE JAE SRCN6A25-16P
※
The Cold Head Power Cable is dedicated to three-phase motor refrigerator unit.