Ulvac C10T, Instruction Manual

Page: 51 / 56

Compressor Unit Instruction Manual
Appendix D
FLOW DIAGRAM
Helium returning from cold head is transferred to the compressor with oil injected and
then compressed. The oil is pooled at the bottom of the compressor inside and
circulated passing through the oil heat exchanger, filter, orifice, solenoid valve and sight
glass.
The compressed high-pressure and high-temperature helium is discharged from the
compressor pump and transferred to the helium heat exchanger. As passing through the
heat exchanger, the heat generated during compression is removed and then the cooled
helium enters oil separator. Inside the oil separator, the oil droplet contained in helium
is removed and returns to the compressor unit after passing through a filter and a
orifice.
At the same time, the helium from oil separator enters an adsorber. As passing through
the adsorber, oil mist contained in helium is removed by adsorption and the helium is
supplied to the cold head via flexible hose.
ULVAC CRYOGENICS INCORPORATED D-1