Ulvac C10T, Instruction Manual

Page: 26 / 56

Installation
0 1 2 3 4 5
6
0.10
(
＊
) The water pressure drop (
Δ
P) means differential pressure between cooling water
inlet pressure and outlet pressure.
Figure 3-2 Cooling Water Requirement
A dashed arrow (
→
) in the graph shows the minimum required water flow rate
(3.5L/min.) and water pressure drop (0.04MPa) when the temperature of the
water
EXAMPLE
Press
ure drop
Δ
P
（＊
）
（
MP
a
）
0.08
0.06
0
0.072
0.02
0.04
0
5
10
15
20
30
32
25
Flow rate
（
L
／
min
）
35
0 1 2 3 4 5 6
Allowable operating range
Te
mp
erature
（
°C
）
3.5
3-4
ULVAC CRYOGENICS INCORPORATED