Ulvac C10T, Instruction Manual

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Compressor Unit Instruction Manual
1. COMPRESSOR UNIT DESCRIPTION
1.1 General ................................................................................................... 1-1
1.2 Specifications .......................................................................................... 1-1
1.1 General
The compressor unit circulates helium continuously in the cryopump system by
compressing helium returned from the refrigerator unit (cold head) and supplying
high-pressure helium to the refrigerator unit.
This compressor unit consists of: 1) a compressor, 2) a cooling system, 3) an oil
separation system and 4) an adsorber.
See Table 1-1 for the compressor specifications.
1.2 Specifications
Table 1-1 Compressor Unit Standard Specifications
◆
Model :
C10T
Power
Source
Volts × Phase × Hz
AC190
～
220V
×
3
Φ ×
50Hz
AC190
～
230V
×
3
Φ ×
60Hz
Power (in normal operation)
(*1)
1.5kW / 1.7kW(50Hz/60Hz)
Nominal Operating Current
(*1)
5A / 6A(50Hz/60Hz)
Cooling Type Water cooled
Cooling Water Requirement
(See Fig.3-2)
Temperature : 5
～
32°C
Flow Rate : 1
～
5L/min
Pressure Drop : 0.01
～
0.072MPa
Ambient Temperature 10
～
38°C
Compressor Winding Resistance 3.04
Ω
,
Adsorber Periodic Replacement Not necessary
Weight 69kg
Cooling Water Inlet/Outlet Rc3/8 female
Helium Gas SUPPLY/RETURN
Connector
1/2B self-sealing coupling
(*1) T
he power consumption or current are higher by around 10% at start up.
The power consumption and current in the above table are standard values when
flexible hoses of 3 meters long are used. The maximum allowable length is 20m,
and the power consumption and current will be larger by 6% with a 20m hose.
ULVAC CRYOGENICS INCORPORATED 1-1