List of tables
Tbl. 1:
Loads exerted on the equipment
Tbl. 2:
Securing the high vacuum flange (inlet flange)
Tbl. 3:
Meaning of LED on the EherCAT interface
Tbl. 4:
Meaning of LED on the Remote/RS232-RS485/Profibus interface
Tbl. 5:
Description of the HHR's keys
Tbl. 6:
Spare parts - ATH 500
Tbl. 7:
Conversion table: Pressure units
Tbl. 8:
Conversion table: Units for gas throughput
Tbl. 9:
Technical characteristics
Tbl. 10:
Environmental characteristics
Tbl. 11:
Cooling water characteristics
Tbl. 12:
Nitrogen characteristics
Tbl. 13:
Electrical characteristics of the pump
Tbl. 14:
Electrical characteristics of the customer’s network
Tbl. 15:
Characteristics of the 48 VDC external power supply
List of tables
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