15 Technical data and dimensions
15.1 General
Basic principles for the Technical Data of Pfeiffer Vacuum turbomolecular pumps:
► Recommendations from PNEUROP committee PN5.
► ISO 21360; 2007: “Vacuum technology - Standard methods for measuring vacuum-pump perform-
ance - General description”
► Ultimate pressure: using a test dome and after 48 hours of baking out.
► Gas throughput: with water cooling.
► Cooling water consumption: at max gas throughput, water temperature 20 °C.
► Sound pressure level: distance of 1 m to the pump.
► Technical data measured without splinter shield at pump inlet.
mbar
bar
Pa
hPa
kPa
Torr | mm Hg
mbar
1
1 · 10
-3
100
1
0.1
0.75
bar
1000
1
1 · 10
5
1000
100
750
Pa
0.01
1 · 10
-5
1
0.01
1 · 10
-3
7.5 · 10
-3
hPa
1
1 · 10
-3
100
1
0.1
0.75
kPa
10
0.01
1000
10
1
7.5
Torr | mm Hg
1.33
1.33 · 10
-3
133.32
1.33
0.133
1
1 Pa = 1 N/m
2
Tbl. 7:
Conversion table: Pressure units
mbar l/s
Pa m
3
/s
sccm
Torr l/s
atm cm
3
/s
mbar l/s
1
0.1
59.2
0.75
0.987
Pa m
3
/s
10
1
592
7.5
9.87
sccm
1.69 · 10
-2
1.69 · 10
-3
1
1.27 · 10
-2
1.67 · 10
-2
Torr l/s
1.33
0.133
78.9
1
1.32
atm cm
3
/s
1.01
0.101
59.8
0.76
1
Tbl. 8:
Conversion table: Units for gas throughput
15.2 Technical data
Technical data
Units
ATH 500 M
ATH 500 M
ATH 500 MT
Inlet flange (High vac-
uum flange)
ISO-F
DN 100
DN 160
DN 160
Exhaust flange
ISO-KF
DN 25
DN 25
DN 40
Purge flange
1)
1/8 BSPP (ISO228)
1/8 BSPP (ISO228)
1/4 VCR
1) The products that have customer specificities may have different characteristics.
2) Standard reference conditions: T0 = 273,15 K - P0 = 1013.25 hPa.
3) At nominal speed with 25 °C water cooling temperature.
4) With an exhaust pressure < 0.4 hPa, depends on external conditions (temperature, water flow rate, ambient tempera-
ture). For other conditions, contact us
5) Reduced maximum flow rate, ultimate pressure at exhaust without loss of flow rate speed. Depends on environmental
conditions.
6) With ISO-F flange (best with CF-F flange). Contact us.
7) This maximum temperature influences the maximum flow, contact us.
8) Up to 90 % of full rotation speed, with exhaust pressure < 0.1 hPa.
Technical data and dimensions
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