20
1000
1100
1200
1300
1400
1500
70
60
50
40
30
Pu
rge
50
SC
CM
Absolute inlet pressure (hPa)
Flow rate (SCCM)
Fig. 10:
Purge flow diagram
Purge device 50 sccm
The operation of this purge is continuous. The integrated flow reducer guarantees a 50 sccm flow for a
pressure of 1.1 · 10
3
hPa.
1. Directly connect the inert gas supply to the
PURGE
port instead of the filter or plug (1/8 BSPP-
ISO228 connection), or to the VCR connection*.
2. Adjust the inert gas pressure to obtain the desired flow (see Purge flow diagram).
* Other connections are possible depending on the ordering guide (see chapter “Product concerned”).
Solenoid valve equipped with a 50 sccm purge (for ATH 500 M only)
This option is available depending on the pump configuration.
This purge solenoid valve must be powered with 24 VDC:
the power supply and control of this sole-
noid valve are the customer's responsibility
.
1. Remove the plug or dust filter from the
PURGE
port.
2. Connect the solenoid valve to the
PURGE
port (1/8 BSPP connection).
The installation and connection of a ‘purge set’ accessory are described in the chapter “Installation of
the purge accessory”.
5.6.2 Installation of the purge accessory
B
1
2
3
4
5
6
7
8
N2
A
Fig. 11:
Purge set
A 1/8'' BSPP connection (ISO 228)
3
H M 4 nut (Qty: 2)
B Electronic drive unit
4-6
Washer (Qty: 4)
1 Solenoid valve cable
5
CHC M4x30 screw (Qty: 2)
2 Solenoid valve coil
7-8
1/8'' BSPP union fitting
Installation
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