6.2.3 Restarting the pump after an emergency equipment stop
The equipment emergency stop manages the pump stop. To restart the pump after an emergency stop,
it is necessary to:
1. Make sure the pump has stopped (all LED are off).
2. Wait until pump rotor has stopped.
3. Correct the problem.
4. Unlock the emergency stop button on the equipment,
5. Start the pump by sending a
‘Start’
pump order via the control panel: the pump starts at the se-
lected speed.
6.3 Shutting down the pump
6.3.1 Pumping shutdown
NOTICE
Risk of damaging the pump by generating an electric arc
The pump and its electronic drive unit must not be disconnected from the electrical network before
the rotor completely stops rotating and the unit is isolated from the electrical network: an electric arc
is created when the circuit is interrupted, which damages internal components.
1. Stop the pump from rotating by sending a
‘Stop’
order on the control interface.
2. Wait for the rotor to completely stop rotating (several minutes).
3. Switch off customer power supply from the equipment.
4. Unplug the mains cable.
Shutdown procedure
Valves V1, V2, V3, V4 are connected and controlled by the equipment (customer’s installation). The
vacuum chamber and the pumping lines are under vacuum, the backing pump is on, and the V3 purge
valve is open.
1. Close the V2 isolation valve to isolate the pump from the vacuum chamber.
2. Send a pump
‘Stop’
order via the HHR, Remote, serial link, or fieldbus control panel.
– The pump slows down.
3. Activate the V4 air inlet solenoid valve (accessory).
4. Close the V1 isolation valve and the backing pump stops.
5. Stop the water-cooling circuit when the pump is
stopped
(the rotor has stopped rotating).
6. Stop the inert gas purge flow.
NOTICE
Inert gas purge function
When the inert gas purge is stopped, the pumped gases can pass from the fore vacuum side to the
high vacuum side and damage the bearing housings.
► Maintain the inert gas purge flow as long as the rotor is running to prolong the flushing.
► The purge maximum pressure must not exceed 1 · 10
3
to 1.5 · 10
3
hPa (absolute).
NOTICE
Air inlet solenoid valve function
The air inlet solenoid valve reduces the braking time required for the pump to get up to the atmos-
pheric pressure. When isolation valves are installed on the pump inlet and exhaust, the rotor slow-
down efficiency is improved.
► If the pump has been stopped by a sudden air inlet,
limit the number of restarts to 2 per hour
.
► if the pump has been stopped without air inlet, the number of restarts is not limited.
► Please contact us for advice on the air inlet solenoid valve.
Operation
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