Pfeiffer Vacuum ATH 1603 M Operating Instructions Manual Download Page 63 | Manualshive

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● fluoroelastomers which may break down if they are exposed to high temperatures,
● components in contact with products resulting from processes which may have been contaminat-

ed.

Decommissioning

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Summary of Contents for ATH 1603 M

Page 1: ...OPERATING INSTRUCTIONS EN Translation of the Original ATH 500 M ATH 500 MT Magnetically levitated turbopump...

Page 2: ...ating instructions supplied with your product Furthermore Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from the use of the product that contradicts its proper use or is...

Page 3: ...drive unit 20 5 Installation 22 5 1 Equipment installation conditions 22 5 1 1 Installation specifications 22 5 1 2 Securing the equipment and the frame 24 5 2 Positioning the pump 24 5 3 Connecting...

Page 4: ...col 51 8 4 3 Command list 52 8 5 Operation via fieldbus 56 9 Maintenance 57 9 1 Maintenance safety instructions 57 9 2 Maintenance frequency 58 9 3 On site maintenance 59 9 4 Exchange procedure by a r...

Page 5: ...15 3 Dimensions 75 Declaration of conformity 77 Table of contents 5 78...

Page 6: ...Tbl 6 Spare parts ATH 500 70 Tbl 7 Conversion table Pressure units 71 Tbl 8 Conversion table Units for gas throughput 71 Tbl 9 Technical characteristics 73 Tbl 10 Environmental characteristics 73 Tbl...

Page 7: ...mp inlet facing up 26 Fig 9 Assembly of the air cooling accessory 30 Fig 10 Purge flow diagram 32 Fig 11 Purge set 32 Fig 12 48 VDC power supply male connector 36 Fig 13 Fan wiring to 48 VDC external...

Page 8: ...instructions 127118 Declaration of conformity included with these operating instructions 1 1 2 Products concerned This document applies to products with the following part numbers Part Number Descrip...

Page 9: ...triangle indicates the only step in an action This is an individual action step Sequence of multi part action steps The numerical list indicates an action with multiple necessary steps 1 Step 1 2 Ste...

Page 10: ...te and visible place on the pump to warn the operator about potential hazards This label warns users that they risk being injured if their hands come into contact with a hot surface protective gloves...

Page 11: ...personal injury Instructions to avoid damage to property Notes tips or examples indicate important information about the product or about this docu ment 2 2 Safety instructions All safety instruction...

Page 12: ...ty for non compliance with installation instructions Only use approved original parts from Pfeiffer Vacuum for connection to the equipment see ac cessories WARNING Risk of poisoning when process gases...

Page 13: ...to the high vacuum connection of the turbopump from the operator side e g open vacuum chamber WARNING Risk of burns in case of contact with hot surfaces For the operator s safety the products are des...

Page 14: ...ions Duty to provide information on potential dangers The product holder or user is obliged to make all operating personnel aware of dangers posed by this product Every person who is involved in the i...

Page 15: ...iverges from the uses already mentioned will be treated as non compliant this includes but is not limited to Pumping reactive fluids Pumping of corrosive or explosive media Pumping liquids Pumping of...

Page 16: ...ven the weight of the product there is a risk of crushing during handling operations Under no cir cumstances shall the manufacturer be liable if the following instructions are not followed Only qualif...

Page 17: ...cure the pump using lifting rings and hoist it 4 Always transport the turbomolecular pump in an upright position 3 3 Storage Storing a new pump Keep the pump wrapped in its protective envelope Always...

Page 18: ...pped with an integrated electronic drive unit These pumps are characterized by their resistance to corrosion robustness high gas throughput at high operating pressure and lack of maintenance requireme...

Page 19: ...nnections 1 8 NPT female 7 Exhaust flange PUMP EXHAUST 4 Electronic drive unit 1 2 3a 3 3b 8 7 6 5 4 Fig 2 Description of an MT version ATH 500 pump 1 Inlet flange high vacuum 4 Electronic drive unit...

Page 20: ...hapter Applicable documents The electronic drive unit does not power the pump Power supply comes from an external 48 VDC unit Regardless of the product s configuration the control interface of the ele...

Page 21: ...atus indicator lights Display of the pump operating status 5 Power supply connector Used to connect a 48 VDC power supply 6 Heater band electrical con nector Heater band power supply 7 Water solenoid...

Page 22: ...the equipment the energy released could launch the entire pump or pieces of the pump across the room This could cause severe possibly fatal injuries as well as serious proper ty damage Strictly comply...

Page 23: ...on the system as a function of the distance to the pump The deceleration of the rotor parts creates a torque value on the pump housing which is transmitted to the equipment Torque C The deceleration...

Page 24: ...anges ISO K flanges do not prevent the accidental rotation of the pump around the equipment flange in the event of the rupture of a rotating part This rotation can damage roughing and purge lines and...

Page 25: ...onal reliability see chapter Installation specifications 3 Stick the safety labels in the operator s language to the most appropriate and visible place on the pump to warn the operator about potential...

Page 26: ...responsible for the equipment and must apply the specific safety instructions in accordance with local regulation DANGER Danger of death by fire when pumping flammable gases There is a fire risk caus...

Page 27: ...m flange Sharp components can be accessed via the inlet flange Rotor and stator blades on turbomolecular pumps have very sharp edges Before starting any work on the product wait for the pump to come t...

Page 28: ...ircuit represents a serious risk for the process it is advisable to control the pump cooling with an external system capable of taking over if the water cir cuit fails WARNING Risk of injury in case o...

Page 29: ...nually place the nut into contact 4 Tighten the nut 1 2 turn using an open ended spanner while holding the body of the connec tor still 5 4 2 Connecting the pump to the water circuit Tightening the co...

Page 30: ...guration air cooled version the pump is equipped with a fan as a factory setting In this case only the electrical wiring is the customer s responsibility With the air cooling the maximum admissible ga...

Page 31: ...th pressurized nitrogen The product uses pressurized nitrogen as a flushing gas Non compliant installations or installations not done to professional standards may endanger the user s life Install a m...

Page 32: ...Solenoid valve equipped with a 50 sccm purge for ATH 500 M only This option is available depending on the pump configuration This purge solenoid valve must be powered with 24 VDC the power supply and...

Page 33: ...sealing tape on the threads 4 Tighten the connection applying a maximum tightening torque of 10 N m 5 Adjust the inert gas pressure to obtain the desired flow see Purge flow diagram 5 7 Connection of...

Page 34: ...tions not done to professional standards may endanger the user s life Only qualified technicians trained in the relevant electrical safety and EMC regulations are au thorized to work on the electrical...

Page 35: ...D standard whose short circuit cut off capacity is at least 10 kA This protection de vice should be in close proximity to the pump no further than 7 m away and in line of sight of the prod uct The cu...

Page 36: ...48 VDC is grounded internally 1 2 4 3 5 6 7 Fig 12 48 VDC power supply male connector 1 Index 5 Not connected 2 Polarity 48 VDC 6 Pump power cable plug Ref UTS6JC104S supplier Souriau France 3 Polari...

Page 37: ...External power supply 4 Water valve power supply MT version pump P Backing pump Turbo Magnetically levitated turbomolecular pump F Fan air cooled version N2 Inert gas input V1 Fore vacuum isolation va...

Page 38: ...s 3 Switch off customer power supply from the equipment 4 Unplug the mains cable WARNING Risk of cutting injuries due to contact with sharp edges via the high vacuum flange Sharp components can be acc...

Page 39: ...ssory 1 The supply power supply and control of these components are the customer s responsibility Pumping start up procedure Initial conditions Valves V1 V2 V3 V4 are connected and controlled by the e...

Page 40: ...uum chamber and the pumping lines are under vacuum the backing pump is on and the V3 purge valve is open 1 Close the V2 isolation valve to isolate the pump from the vacuum chamber 2 Send a pump Stop o...

Page 41: ...ff 1 Switch off the pump by setting the main 48 VDC switch to O All LEDs on the electronic drive unit are off Wait for the rotor to completely stop rotating 2 Disconnect the pump supply cable from the...

Page 42: ...th power Yellow on The pump has not reached the selected speed Flashing yellow The pump speed decreases speed 60 min 1 Yellow STBY on Stand by mode selected Green on The pump has reached the selected...

Page 43: ...he serial link or fieldbus see chapter Control modes Depending on the temperature setpoint chosen to heat the pump and the temperature of the cooling water circuit the pump can take a certain amount o...

Page 44: ...s EtherCAT are availa ble in the ordering guide Choice of control mode The selected mode controls the pump The control mode can be selected via the HHR unit via serial link RS 232 RS 485 8 2 Control v...

Page 45: ...d the monitored parameters Use the keys to scroll through the monitored parameters KEYB xxxx H Pump 24 C 0 00 A Ctrl 27 C 0 rpm Ready to start 1 2 3 4 1 Control mode 3 Operating parameters fault messa...

Page 46: ...menu using PREV key KEYB xxxx H STATUS VER FAULT WARNING BEARING Ready to start 3 Access to the menu SETUP using keys Access the menu using ENTER key KEYB xxxx H DISPLAY SETUP SER NUM Ready to start 3...

Page 47: ...erial link trans mission speed 9K6 RS 232 ECHO ON OFF Activate all received characters to be echoed over the RS 232 serial link OFF RS SEPARATOR 0 to 255 Enter the separator character in AS CII e g 04...

Page 48: ...be set via the RS 232 RS 485 serial link or the HHR unit Use shielded cable and connect both sides to the ground 8 3 1 Logic input wiring Control by direct voltage The inputs are active when a DC vol...

Page 49: ...unction 1 6 Relay At Speed Contact closed OK for Process at speed M version speed nominal speed set by Relay At Speed pa rameter see chapter SETUP menu or see chapter List of commands MT version speed...

Page 50: ...insulated product When powering off _mains switch to O_ certain components located between the mains connection and the circuit breaker will still contain an electric charge live There is a risk of e...

Page 51: ...k 1 4 W 120 1 4 W Configuration The serial link control mode is active when the wiring is done and when the Serial link control mode is configured by the HHR see chapter SETUP menu or on the RS 232 R...

Page 52: ...fault The arrow indicates the ongoing warning fault Example 00000 02 20 Default list 00000 01 37 Default in current Yh 00000 01 37 PM Default 00000 02 20 Warning list 00000 02 37 Holweck Temp sensor 0...

Page 53: ...keyboard n 1 Remote control mode hardware n 2 RS 232 RS 485 control mode n 5 Profibus fieldbus control mode n 8 EtherCAT fieldbus control mode not possible with EtherCAT XX 25 Braking control n 1 no m...

Page 54: ...lay setpoint 3 50 3 XX 31 temperature control C MT pump version 30 65 30 XX 32 landing bearing threshold 0 99 20 ccccc value TMP ON or OFF Start Stop the pump The pump rotation starts with TMPON The p...

Page 55: ...when starting at speed or overspeed STA none s2 pump status Bit 7 6 5 4 3 2 1 0 Fault Warning Temp Braking Free Acceler ating Rotating Power in it 0 OFF OFF OFF 0 OFF OFF 1 1 if fault is activat ed O...

Page 56: ...Z 15 Bearing Bearing change 16 Electronic temperature Electronic temperature 17 Pump temperature pump sen sor Pump temperature 18 19 20 Self check 21 22 23 24 Internal communication 8 5 Operation via...

Page 57: ...ff all the ports with airtight blanking plates the product comes with blanking plates that are also available for sale as accessories WARNING Risk of cutting injuries due to contact with sharp edges v...

Page 58: ...Collect the residues from the processes and call in a competent organization to dispose of them Always protect the inlet and exhaust flange surfaces 9 2 Maintenance frequency By design the pump does...

Page 59: ...housing 2 Splinter shield For reassembly respect the following instructions 1 Install the splinter shield in the inlet housing groove bent side facing the vacuum chamber 2 Position the ring and manua...

Page 60: ...the pipework from freezing during trans port To do this users will need to provide flexible tubes and connections as well as a compressed air circuit pressure 2 to 5 103 hPa AIR PRESSURE 1 2 3 1 Pipe...

Page 61: ...trogen flow N2 30 Pressurizing the pump 1 Seal the pump inlet with airtight connecting accessories 2 Pressurize the pump with nitrogen to a relative pressure of 120 hPa 3 Stop the nitrogen flow N2 Lab...

Page 62: ...ervice center see chapter Service solutions by Pfeiffer Vac uum page 67 10 2 Recommissioning To restart the pump after prolonged storage refer to the installation instructions see chapter Installa tio...

Page 63: ...fluoroelastomers which may break down if they are exposed to high temperatures components in contact with products resulting from processes which may have been contaminat ed Decommissioning 63 78...

Page 64: ...d wait until the rotor has stopped Set the switch on the 48 VDC external power supply to O 2 Wait approximately 15 seconds 3 Correct the cause of the fault 4 Restore power supply Set the switch on the...

Page 65: ...cked by process by products Safety shut down Mechanical or electrical problem The electronic drive unit stops the motor The START contact opens The pump cannot restart Contact our service center Drive...

Page 66: ...Connecting the pump to the water circuit Bearing The landing bearings must be replaced landing bearing counter reaches the warning threshold The authorized limit for the number of landings on land ing...

Page 67: ...ity You can find more detailed information and addresses on our homepage in the Pfeiffer Vacuum Service section You can obtain advice on the optimal solution for you from your Pfeiffer Vacuum represen...

Page 68: ...duct in suitable stable transport containers only e Maintain applicable transport conditions ERKL RUNG KONTAMINIERUNG 6 Attach the contamination declaration to the outside of the packag ing 7 Now send...

Page 69: ...power cable This cable allows the connection of the external power supply to the mains length 2 m Europe standard 200 240V AC 48 VDC 103566 US standard 200 240V AC 48 VDC 103898 Power cable The cable...

Page 70: ...d air inlet valve Dust filter ATH 500 M ATH 500 MT 106229 on air inlet solenoid valve 48 VDC fan cable ATH 500 M ATH 500 MT A464597 Water solenoid valve set Valve body 48 VDC coil 1 8 NPT straight con...

Page 71: ...0 987 Pa m3 s 10 1 592 7 5 9 87 sccm 1 69 10 2 1 69 10 3 1 1 27 10 2 1 67 10 2 Torr l s 1 33 0 133 78 9 1 1 32 atm cm3 s 1 01 0 101 59 8 0 76 1 Tbl 8 Conversion table Units for gas throughput 15 2 Tec...

Page 72: ...rate hPa l s 5 10 8 5 10 8 5 10 8 Purge flow rate 2 sccm 50 50 50 Supply voltage VDC 48 48 48 Start up time 8 mn 2 2 2 Start up power Watt 560 560 560 Power consumed at ultimate pressure Watt 100 100...

Page 73: ...re 0 1 hPa Tbl 9 Technical characteristics 15 2 1 Environmental characteristics Use indoor use Installation altitude up to 2 000 m Protection rating air cooled pump Protection rating water cooled pump...

Page 74: ...e please contact us Tbl 11 Cooling water characteristics 15 2 3 Nitrogen characteristics H2O concentration 10 ppm v O2 concentration 5 ppm v Dust 1 m Oil 0 1 ppm v Absolut pressure 1 103 to 1 5 103 hP...

Page 75: ...supply 2 if current value is higher add a protection system Tbl 15 Characteristics of the 48 VDC external power supply The supply cable used with this power supply must be compatible with the pump sup...

Page 76: ...y Inlet flange E H J K L D d1 d2 N CG CG1 DN 160 ISO F mm 16 159 3 182 5 182 2 254 9 225 200 11 8 112 6 9 7 DN 160 ISO K mm 12 159 3 182 5 182 2 254 9 180 128 6 11 3 DN 160 CF F mm 20 180 3 203 5 203...

Page 77: ...he Low Voltage Directive 2014 35 EU are complied with in accordance with Annex I No 1 5 1 of the Machinery 2006 42 EC Harmonized standards and national standards and specifications which have been app...

Page 78: ...114436 Ed 08 Date 2020 06 P N 114436OEN...

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