D-160TS-7-E
38
18. ERROR/ALARM LIST
Name
Message
Output during anomaly
Description
Pulse
output
Status output
No
output
ERR
output
ERR,
ALM
output
Flow
ALM
output
ERR,
Flow ALM
output
Parameter error 1
E
r
r.
0 1
Halt
OFF
ON
ON
OFF
ON
Error in parameter setting
memory.
Parameter error 2
E
r
r.
0 2
Error in status setting
memory.
Parameter error 3
E
r
r.
0 3
Error in filter setting
memory.
CPU1
communication
error
E
r
r.
1 0
CPU1 operation error
EEPROM error
E
r
r.
1 2
EEPROM operation error
CPU2
communication
error
E
r
r.
1 3
CPU2 communication error
CPU3
communication
error
E
r
r.
1 4
CPU3 communication error
Internal voltage
low limit error
E
r
r.
3
2
Voltage of internal circuit is
below low limit (the same
applies to Err.34, 36, 38).
Internal voltage
high limit error
E
r
r.
3
3
Voltage of internal circuit is
above high limit (the same
applies to Err.35, 37, 39).
Sensor error
E
r
r.
4 0
Error in the sensor.
Instant flow rate
low limit alarm
A L m
5 6
Normal
operation
OFF OFF
ON
ON
ON
Instant flow rate < alarm
low limit setting
Instant flow rate
high limit alarm
A L m
5 7
Instant flow rate > alarm
high limit setting
Internal temp.
decrease alarm
A L m
6 1
Normal
operation
OFF OFF
ON
OFF OFF
Internal temperature of the converter
is below spec. condition.
Internal temp.
increase alarm
A
L
m
6 2
Internal temperature of the converter
is above spec. condition.
Pulse output
alarm
A
L
m
6
4
Halt
OFF OFF
ON
OFF OFF
Output pulse is not generated
properly. (The same applies
to ALm51, 54, 63).
Category
Err
or
Alarm
Applicable to software ver. 1.11 or later.