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6
INTRODUC
TIO
N
Applicabl
e S
EMI
Standards
CIDRW System
User’s Manual
INTRODUCTION
Applicable SEMI Standards
This CIDRW system complies with the following standards.
• SEMI E99 THE CARRIER ID READER/WRITER FUNCTIONAL STANDARD
• SEMI E5 EQUIPMENT COMMUNICATION STANDARD 2 MESSAGE CONTENT (SECS
II
)
• SEMI E4 EQUIPMENT COMMUNICATION STANDARD 1 MESSAGE TRANSFER (SECS
I
)
SEMI is the acronym for Semiconductor Equipment and Materials International.
SECS is the acronym for SEMI Equipment Communication Standard.
Summary of Contents for V640-HS61
Page 14: ...12 INTRODUCTION Reading this Manual CIDRW System User s Manual INTRODUCTION MEMO...
Page 120: ...118 SECTION 5 When SECS Is Not Used CIDRW System User s Manual SECTION 5 Troubleshooting MEMO...
Page 171: ...CIDRW System User s Manual SECTION 6 Protective Construction SECTION 6 Appendix 169 MEMO...
Page 173: ......