EDH0316En1031 — 11/18
6
ZVR Series Integrated Vertical and Rotation Stages for Wafer Positioning
4.2
DC-Servo Drive Axis
The ZVR-PC rotation axis is equipped with a DC-motor.
DC-Motor Performance Specifications and Characteristics
Command Signals for the DC-Motors
In the above drawings, + Motor signal is referenced to – Motor signal.
➀
When the stage moves in + Direction, the + Motor voltage is higher than
– Motor voltage.
➁
When the stage moves in – Direction, the + Motor voltage is lower than
– Motor voltage.
4.3
Sensor Position
End-of-Run and Mechanical Zero are 5 V open collector type.
The Index Pulse provides a repeatable Home Position at ±1 step.
CAUTION
“End-of-Run” and “Mechanical Zero” are active signals and should not
be connected to any other source.
Resolution Speed Nominal Max RMS Max. Peak Resistance Inductance Tachometer
(°) (°/s) Voltage (V) Current (A) Current (A) (
Ω
) (mH) Const. (V/krpm)
ZVR-PC Rotaion Axis
0.002
(1)
80 48 0.9 1.8 2.58 0.52 –
1)
When used with an XPS motion controller.
Dir
+V
+ Motor
– Motor
–V
MOTION
Dir
MOTION
Direction –
– EOR Limit
Mechanical
Zero
Stage Travel Range
Index Pulse
Index Pulse
+ EOR Limit
Home Position (Origin)
at Center of Travel Range
Direction –
MOTION
Dir
