EDH0316En1031 — 11/18
4
ZVR Series Integrated Vertical and Rotation Stages for Wafer Positioning
3.2
Mechanical Specifications
CAUTION
To reach specifications stated, stages must be fixed on a plane surface
with a flatness of 50 µm.
3.3
Load Specification Definitions
Normal Load Capacity (Cz)
Maximum load a rotation stage can move while maintaining specifications.
This value is given with speed and acceleration specified for each rotation
stage, and with a load perpendicular to the bearings.
Off-Centered Load (Q)
Maximum cantilever-load a rotation stage can move: Q
≤
Cz ÷ (1 + D/a)
D: Cantilever distance.
a: Construction parameter.
G
U
AR
ANTE
E
D
S
P
E
CIFICATIO
N
S
Theta Rotation Stage Specifications ZVR-PP ZVR-PC
Travel Range (°) ±165 or continuous 360
Minimum Incremental Motion
(1)
(°) 0.0002 0.002
Accuracy
(3)
, Typical (Guaranteed) (°) ±10 (±17) ±10 (±15)
Unidirectional Repeatability
(3)
, Typical (Guaranteed) (°) ±0.001 (±0.0015) ±0.0005 (±0.0015)
Bidirectional Repeatability
(3)
, Typical (Guaranteed) (°) ±0.003 (±0.006) ±0.0013 (±0.003)
Max. Speed (°/s) 40 80
Wobble
(3)
, Typical (Guaranteed) (µrad) ±22 (±40)
Eccentricity
(3)
, Typical (Guaranteed) (µm) ±2.2 (±4)
Z Vertical Stage Specifications
Travel (mm) 10
Minimum Incremental Motion
(1)
(µm) 0.5
Accuracy
(3)
, Open Loop, Typical (Guaranteed) (µm) ±0.5 (±2)
Unidirectional Repeatability
(3)
, Open Loop, Typical (Guaranteed) (µm) ±0.4 (±2)
Bidirectional Repeatability
(3)
, Open Loop, Typical (Guaranteed) (µm) ±1.2 (±2)
XY Cross Talk
(2)
, Typical (µm) ±0.1
Max. Speed (mm/s) 10
Pitch, Yaw
(3)(4)
, Typical (Guaranteed) (µrad) ±17 (±35)
1)
Depends on controller, see www.newport.com for more information.
2)
XY deviation when Z direction of motion is reversed.
3)
For the definition of Typical and Guaranteed specifications see “Motion Basics Terminology & Standards” Tutorial
at www.newport.com
4)
To obtain arcsec units, divide µrad value by 4.8.
Guaranteed and Typical Specifications
Guaranteed maximum performance values are verified per Newport's A167
metrology test procedure. For more information, please consult the
metrology tutorial section in the Newport catalog or at
www.newport.com
